2/8/2011	7:44:30 AM	Recipe started at 7:44 AM
2/8/2011	7:44:30 AM	Helium valve closed
2/8/2011	7:44:30 AM	BCl3 valve closed
2/8/2011	7:44:30 AM	PH3 valve closed
2/8/2011	7:44:30 AM	SiCl4 pre valve closed
2/8/2011	7:44:30 AM	SiCl4 post valve closed
2/8/2011	7:44:30 AM	Main Vac valve closed
2/8/2011	7:44:30 AM	Bypass valve closed
2/8/2011	7:44:30 AM	Bubbler valve closed
2/8/2011	7:44:30 AM	H2 valve opened
2/8/2011	7:44:30 AM	Helium MFC set to  0.000000
2/8/2011	7:44:30 AM	H2 MFC set to  500.000000
2/8/2011	7:44:30 AM	BCl3 MFC set to  0.000000
2/8/2011	7:44:30 AM	PHl3 MFC set to  0.000000
2/8/2011	7:44:30 AM	SiCl4 MFC set to  0.000000
2/8/2011	7:44:30 AM	Bypass solenoid MFC set to  0.000000
2/8/2011	7:44:30 AM	Tube furnace set to 0
2/8/2011	7:45:54 AM	Helium valve closed
2/8/2011	7:45:54 AM	BCl3 valve closed
2/8/2011	7:45:54 AM	PH3 valve closed
2/8/2011	7:45:54 AM	SiCl4 pre valve closed
2/8/2011	7:45:54 AM	SiCl4 post valve closed
2/8/2011	7:45:54 AM	Main Vac valve closed
2/8/2011	7:45:54 AM	Bypass valve closed
2/8/2011	7:45:54 AM	H2 valve opened
2/8/2011	7:45:54 AM	Bubbler valve opened
2/8/2011	7:45:54 AM	Helium MFC set to  0.000000
2/8/2011	7:45:54 AM	H2 MFC set to  500.000000
2/8/2011	7:45:54 AM	BCl3 MFC set to  0.000000
2/8/2011	7:45:54 AM	PHl3 MFC set to  0.000000
2/8/2011	7:45:54 AM	SiCl4 MFC set to  0.000000
2/8/2011	7:45:54 AM	Bypass solenoid MFC set to  0.000000
2/8/2011	7:45:54 AM	Tube furnace set to 1000
2/8/2011	8:05:54 AM	Helium valve closed
2/8/2011	8:05:54 AM	PH3 valve closed
2/8/2011	8:05:54 AM	Main Vac valve closed
2/8/2011	8:05:54 AM	Bypass valve closed
2/8/2011	8:05:54 AM	H2 valve opened
2/8/2011	8:05:54 AM	BCl3 valve opened
2/8/2011	8:05:54 AM	SiCl4 pre valve opened
2/8/2011	8:05:54 AM	SiCl4 post valve opened
2/8/2011	8:05:54 AM	Bubbler valve opened
2/8/2011	8:05:54 AM	Helium MFC set to  0.000000
2/8/2011	8:05:54 AM	H2 MFC set to  500.000000
2/8/2011	8:05:54 AM	BCl3 MFC set to  0.000000
2/8/2011	8:05:54 AM	PHl3 MFC set to  0.000000
2/8/2011	8:05:54 AM	SiCl4 MFC set to  50.000000
2/8/2011	8:05:54 AM	Bypass solenoid MFC set to  0.000000
2/8/2011	8:05:55 AM	Tube furnace set to 1000
2/8/2011	8:20:55 AM	H2 valve closed
2/8/2011	8:20:55 AM	BCl3 valve closed
2/8/2011	8:20:55 AM	PH3 valve closed
2/8/2011	8:20:55 AM	SiCl4 pre valve closed
2/8/2011	8:20:55 AM	SiCl4 post valve closed
2/8/2011	8:20:55 AM	Main Vac valve closed
2/8/2011	8:20:55 AM	Bypass valve closed
2/8/2011	8:20:55 AM	Helium valve opened
2/8/2011	8:20:55 AM	Bubbler valve opened
2/8/2011	8:20:55 AM	Helium MFC set to  500.000000
2/8/2011	8:20:55 AM	H2 MFC set to  0.000000
2/8/2011	8:20:55 AM	BCl3 MFC set to  0.000000
2/8/2011	8:20:55 AM	PHl3 MFC set to  0.000000
2/8/2011	8:20:55 AM	SiCl4 MFC set to  0.000000
2/8/2011	8:20:55 AM	Bypass solenoid MFC set to  0.000000
2/8/2011	8:20:55 AM	Tube furnace set to 0
2/8/2011	8:40:55 AM	Helium valve closed
2/8/2011	8:40:55 AM	H2 valve closed
2/8/2011	8:40:55 AM	BCl3 valve closed
2/8/2011	8:40:55 AM	PH3 valve closed
2/8/2011	8:40:55 AM	SiCl4 pre valve closed
2/8/2011	8:40:55 AM	SiCl4 post valve closed
2/8/2011	8:40:55 AM	Main Vac valve closed
2/8/2011	8:40:55 AM	Bypass valve closed
2/8/2011	8:40:55 AM	Bubbler valve closed
2/8/2011	8:40:55 AM	Helium MFC set to  0.000000
2/8/2011	8:40:55 AM	H2 MFC set to  0.000000
2/8/2011	8:40:55 AM	BCl3 MFC set to  0.000000
2/8/2011	8:40:55 AM	PHl3 MFC set to  0.000000
2/8/2011	8:40:55 AM	SiCl4 MFC set to  0.000000
2/8/2011	8:40:55 AM	Bypass solenoid MFC set to  0.000000
2/8/2011	8:40:55 AM	Tube furnace set to 0
2/8/2011	8:40:55 AM	Run finished at 8:40 AM
2/8/2011	8:54:05 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/8/2011	8:54:05 AM	Recipe started at 8:54 AM
2/8/2011	8:54:05 AM	H2 valve closed
2/8/2011	8:54:05 AM	BCl3 valve closed
2/8/2011	8:54:05 AM	PH3 valve closed
2/8/2011	8:54:05 AM	SiCl4 pre valve closed
2/8/2011	8:54:05 AM	SiCl4 post valve closed
2/8/2011	8:54:05 AM	Main Vac valve closed
2/8/2011	8:54:05 AM	Bypass valve closed
2/8/2011	8:54:05 AM	Bubbler valve closed
2/8/2011	8:54:05 AM	Helium valve opened
2/8/2011	8:54:05 AM	Helium MFC set to  500.000000
2/8/2011	8:54:05 AM	H2 MFC set to  0.000000
2/8/2011	8:54:05 AM	BCl3 MFC set to  0.000000
2/8/2011	8:54:05 AM	PHl3 MFC set to  0.000000
2/8/2011	8:54:05 AM	SiCl4 MFC set to  0.000000
2/8/2011	8:54:05 AM	Bypass solenoid MFC set to  0.000000
2/8/2011	8:54:06 AM	Tube furnace set to 0
2/8/2011	8:54:07 AM	Helium valve closed
2/8/2011	8:54:07 AM	H2 valve closed
2/8/2011	8:54:07 AM	BCl3 valve closed
2/8/2011	8:54:07 AM	PH3 valve closed
2/8/2011	8:54:07 AM	SiCl4 pre valve closed
2/8/2011	8:54:07 AM	SiCl4 post valve closed
2/8/2011	8:54:07 AM	Main Vac valve closed
2/8/2011	8:54:07 AM	Bypass valve closed
2/8/2011	8:54:07 AM	Bubbler valve closed
2/8/2011	8:54:07 AM	Helium MFC set to  0.000000
2/8/2011	8:54:07 AM	H2 MFC set to  0.000000
2/8/2011	8:54:07 AM	BCl3 MFC set to  0.000000
2/8/2011	8:54:07 AM	PHl3 MFC set to  0.000000
2/8/2011	8:54:07 AM	SiCl4 MFC set to  0.000000
2/8/2011	8:54:07 AM	Bypass solenoid MFC set to  0.000000
2/8/2011	8:54:08 AM	Tube furnace set to 0
2/8/2011	8:54:08 AM	Run finished at 8:54 AM
2/8/2011	8:54:08 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/8/2011	10:03:17 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/8/2011	10:03:17 AM	Recipe started at 10:03 AM
2/8/2011	10:03:18 AM	H2 valve closed
2/8/2011	10:03:18 AM	BCl3 valve closed
2/8/2011	10:03:18 AM	PH3 valve closed
2/8/2011	10:03:18 AM	SiCl4 pre valve closed
2/8/2011	10:03:18 AM	SiCl4 post valve closed
2/8/2011	10:03:18 AM	Main Vac valve closed
2/8/2011	10:03:18 AM	Bypass valve closed
2/8/2011	10:03:18 AM	Bubbler valve closed
2/8/2011	10:03:18 AM	Helium valve opened
2/8/2011	10:03:18 AM	Helium MFC set to  500.000000
2/8/2011	10:03:18 AM	H2 MFC set to  0.000000
2/8/2011	10:03:18 AM	BCl3 MFC set to  0.000000
2/8/2011	10:03:18 AM	PHl3 MFC set to  0.000000
2/8/2011	10:03:18 AM	SiCl4 MFC set to  0.000000
2/8/2011	10:03:18 AM	Bypass solenoid MFC set to  0.000000
2/8/2011	10:03:18 AM	Tube furnace set to 0
2/8/2011	10:03:18 AM	Helium valve closed
2/8/2011	10:03:18 AM	H2 valve closed
2/8/2011	10:03:18 AM	BCl3 valve closed
2/8/2011	10:03:18 AM	PH3 valve closed
2/8/2011	10:03:18 AM	SiCl4 pre valve closed
2/8/2011	10:03:18 AM	SiCl4 post valve closed
2/8/2011	10:03:18 AM	Main Vac valve closed
2/8/2011	10:03:18 AM	Bypass valve closed
2/8/2011	10:03:18 AM	Bubbler valve closed
2/8/2011	10:03:18 AM	Helium MFC set to  0.000000
2/8/2011	10:03:18 AM	H2 MFC set to  0.000000
2/8/2011	10:03:18 AM	BCl3 MFC set to  0.000000
2/8/2011	10:03:18 AM	PHl3 MFC set to  0.000000
2/8/2011	10:03:18 AM	SiCl4 MFC set to  0.000000
2/8/2011	10:03:18 AM	Bypass solenoid MFC set to  0.000000
2/8/2011	10:03:18 AM	Tube furnace set to 0
2/8/2011	10:03:18 AM	Run finished at 10:03 AM
2/8/2011	10:03:18 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/8/2011	10:03:21 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/8/2011	10:03:22 AM	Recipe started at 10:03 AM
2/8/2011	10:03:22 AM	Helium valve closed
2/8/2011	10:03:22 AM	H2 valve closed
2/8/2011	10:03:22 AM	BCl3 valve closed
2/8/2011	10:03:22 AM	PH3 valve closed
2/8/2011	10:03:22 AM	SiCl4 pre valve closed
2/8/2011	10:03:22 AM	SiCl4 post valve closed
2/8/2011	10:03:22 AM	Main Vac valve closed
2/8/2011	10:03:22 AM	Bubbler valve closed
2/8/2011	10:03:22 AM	Bypass valve opened
2/8/2011	10:03:22 AM	Helium MFC set to  0.000000
2/8/2011	10:03:22 AM	H2 MFC set to  0.000000
2/8/2011	10:03:22 AM	BCl3 MFC set to  0.000000
2/8/2011	10:03:22 AM	PHl3 MFC set to  0.000000
2/8/2011	10:03:22 AM	SiCl4 MFC set to  0.000000
2/8/2011	10:03:22 AM	Bypass solenoid MFC set to  0.000000
2/8/2011	10:03:22 AM	Tube furnace set to 0
2/8/2011	10:03:56 AM	Helium valve closed
2/8/2011	10:03:56 AM	H2 valve closed
2/8/2011	10:03:56 AM	BCl3 valve closed
2/8/2011	10:03:56 AM	PH3 valve closed
2/8/2011	10:03:56 AM	SiCl4 pre valve closed
2/8/2011	10:03:56 AM	SiCl4 post valve closed
2/8/2011	10:03:56 AM	Bubbler valve closed
2/8/2011	10:03:56 AM	Main Vac valve opened
2/8/2011	10:03:56 AM	Bypass valve opened
2/8/2011	10:03:56 AM	Helium MFC set to  0.000000
2/8/2011	10:03:56 AM	H2 MFC set to  0.000000
2/8/2011	10:03:56 AM	BCl3 MFC set to  0.000000
2/8/2011	10:03:56 AM	PHl3 MFC set to  0.000000
2/8/2011	10:03:56 AM	SiCl4 MFC set to  0.000000
2/8/2011	10:03:56 AM	Bypass solenoid MFC set to  0.000000
2/8/2011	10:03:56 AM	Tube furnace set to 0
2/8/2011	10:03:56 AM	Run finished at 10:03 AM
2/8/2011	10:03:56 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/8/2011	10:04:27 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
2/8/2011	10:04:40 AM	Recipe started at 10:04 AM
2/8/2011	10:04:40 AM	Helium valve closed
2/8/2011	10:04:40 AM	H2 valve closed
2/8/2011	10:04:40 AM	BCl3 valve closed
2/8/2011	10:04:40 AM	PH3 valve closed
2/8/2011	10:04:40 AM	SiCl4 pre valve closed
2/8/2011	10:04:40 AM	SiCl4 post valve closed
2/8/2011	10:04:40 AM	Main Vac valve closed
2/8/2011	10:04:40 AM	Bubbler valve closed
2/8/2011	10:04:40 AM	Bypass valve opened
2/8/2011	10:04:40 AM	Helium MFC set to  0.000000
2/8/2011	10:04:40 AM	H2 MFC set to  0.000000
2/8/2011	10:04:40 AM	BCl3 MFC set to  0.000000
2/8/2011	10:04:40 AM	PHl3 MFC set to  0.000000
2/8/2011	10:04:40 AM	SiCl4 MFC set to  0.000000
2/8/2011	10:04:40 AM	Bypass solenoid MFC set to  0.000000
2/8/2011	10:04:40 AM	Tube furnace set to 0
2/8/2011	10:04:41 AM	Helium valve closed
2/8/2011	10:04:41 AM	H2 valve closed
2/8/2011	10:04:41 AM	BCl3 valve closed
2/8/2011	10:04:41 AM	PH3 valve closed
2/8/2011	10:04:41 AM	SiCl4 pre valve closed
2/8/2011	10:04:41 AM	SiCl4 post valve closed
2/8/2011	10:04:41 AM	Bubbler valve closed
2/8/2011	10:04:41 AM	Main Vac valve opened
2/8/2011	10:04:41 AM	Bypass valve opened
2/8/2011	10:04:41 AM	Helium MFC set to  0.000000
2/8/2011	10:04:41 AM	H2 MFC set to  0.000000
2/8/2011	10:04:41 AM	BCl3 MFC set to  0.000000
2/8/2011	10:04:41 AM	PHl3 MFC set to  0.000000
2/8/2011	10:04:41 AM	SiCl4 MFC set to  0.000000
2/8/2011	10:04:41 AM	Bypass solenoid MFC set to  0.000000
2/8/2011	10:04:41 AM	Tube furnace set to 0
2/8/2011	10:05:41 AM	H2 valve closed
2/8/2011	10:05:41 AM	BCl3 valve closed
2/8/2011	10:05:41 AM	PH3 valve closed
2/8/2011	10:05:41 AM	SiCl4 pre valve closed
2/8/2011	10:05:41 AM	SiCl4 post valve closed
2/8/2011	10:05:41 AM	Bubbler valve closed
2/8/2011	10:05:41 AM	Helium valve opened
2/8/2011	10:05:41 AM	Main Vac valve opened
2/8/2011	10:05:41 AM	Bypass valve opened
2/8/2011	10:05:41 AM	Helium MFC set to  100.000000
2/8/2011	10:05:41 AM	H2 MFC set to  0.000000
2/8/2011	10:05:41 AM	BCl3 MFC set to  0.000000
2/8/2011	10:05:41 AM	PHl3 MFC set to  0.000000
2/8/2011	10:05:41 AM	SiCl4 MFC set to  0.000000
2/8/2011	10:05:41 AM	Bypass solenoid MFC set to  0.000000
2/8/2011	10:05:41 AM	Tube furnace set to 0
2/8/2011	10:06:41 AM	Helium valve closed
2/8/2011	10:06:41 AM	H2 valve closed
2/8/2011	10:06:41 AM	BCl3 valve closed
2/8/2011	10:06:41 AM	PH3 valve closed
2/8/2011	10:06:41 AM	SiCl4 pre valve closed
2/8/2011	10:06:41 AM	SiCl4 post valve closed
2/8/2011	10:06:41 AM	Bubbler valve closed
2/8/2011	10:06:41 AM	Main Vac valve opened
2/8/2011	10:06:41 AM	Bypass valve opened
2/8/2011	10:06:41 AM	Helium MFC set to  0.000000
2/8/2011	10:06:41 AM	H2 MFC set to  0.000000
2/8/2011	10:06:41 AM	BCl3 MFC set to  0.000000
2/8/2011	10:06:41 AM	PHl3 MFC set to  0.000000
2/8/2011	10:06:41 AM	SiCl4 MFC set to  0.000000
2/8/2011	10:06:41 AM	Bypass solenoid MFC set to  0.000000
2/8/2011	10:06:41 AM	Tube furnace set to 0
2/8/2011	10:07:41 AM	H2 valve closed
2/8/2011	10:07:41 AM	BCl3 valve closed
2/8/2011	10:07:41 AM	PH3 valve closed
2/8/2011	10:07:41 AM	SiCl4 pre valve closed
2/8/2011	10:07:41 AM	SiCl4 post valve closed
2/8/2011	10:07:41 AM	Bubbler valve closed
2/8/2011	10:07:41 AM	Helium valve opened
2/8/2011	10:07:41 AM	Main Vac valve opened
2/8/2011	10:07:41 AM	Bypass valve opened
2/8/2011	10:07:41 AM	Helium MFC set to  100.000000
2/8/2011	10:07:41 AM	H2 MFC set to  0.000000
2/8/2011	10:07:41 AM	BCl3 MFC set to  0.000000
2/8/2011	10:07:41 AM	PHl3 MFC set to  0.000000
2/8/2011	10:07:41 AM	SiCl4 MFC set to  0.000000
2/8/2011	10:07:41 AM	Bypass solenoid MFC set to  0.000000
2/8/2011	10:07:41 AM	Tube furnace set to 0
2/8/2011	10:08:42 AM	Helium valve closed
2/8/2011	10:08:42 AM	H2 valve closed
2/8/2011	10:08:42 AM	BCl3 valve closed
2/8/2011	10:08:42 AM	PH3 valve closed
2/8/2011	10:08:42 AM	SiCl4 pre valve closed
2/8/2011	10:08:42 AM	SiCl4 post valve closed
2/8/2011	10:08:42 AM	Bubbler valve closed
2/8/2011	10:08:42 AM	Main Vac valve opened
2/8/2011	10:08:42 AM	Bypass valve opened
2/8/2011	10:08:42 AM	Helium MFC set to  0.000000
2/8/2011	10:08:42 AM	H2 MFC set to  0.000000
2/8/2011	10:08:42 AM	BCl3 MFC set to  0.000000
2/8/2011	10:08:42 AM	PHl3 MFC set to  0.000000
2/8/2011	10:08:42 AM	SiCl4 MFC set to  0.000000
2/8/2011	10:08:42 AM	Bypass solenoid MFC set to  0.000000
2/8/2011	10:08:42 AM	Tube furnace set to 0
2/8/2011	10:09:42 AM	H2 valve closed
2/8/2011	10:09:42 AM	BCl3 valve closed
2/8/2011	10:09:42 AM	PH3 valve closed
2/8/2011	10:09:42 AM	SiCl4 pre valve closed
2/8/2011	10:09:42 AM	SiCl4 post valve closed
2/8/2011	10:09:42 AM	Bubbler valve closed
2/8/2011	10:09:42 AM	Helium valve opened
2/8/2011	10:09:42 AM	Main Vac valve opened
2/8/2011	10:09:42 AM	Bypass valve opened
2/8/2011	10:09:42 AM	Helium MFC set to  100.000000
2/8/2011	10:09:42 AM	H2 MFC set to  0.000000
2/8/2011	10:09:42 AM	BCl3 MFC set to  0.000000
2/8/2011	10:09:42 AM	PHl3 MFC set to  0.000000
2/8/2011	10:09:42 AM	SiCl4 MFC set to  0.000000
2/8/2011	10:09:42 AM	Bypass solenoid MFC set to  0.000000
2/8/2011	10:09:42 AM	Tube furnace set to 0
2/8/2011	10:10:42 AM	Helium valve closed
2/8/2011	10:10:42 AM	H2 valve closed
2/8/2011	10:10:42 AM	BCl3 valve closed
2/8/2011	10:10:42 AM	PH3 valve closed
2/8/2011	10:10:42 AM	SiCl4 pre valve closed
2/8/2011	10:10:42 AM	SiCl4 post valve closed
2/8/2011	10:10:42 AM	Bubbler valve closed
2/8/2011	10:10:42 AM	Main Vac valve opened
2/8/2011	10:10:42 AM	Bypass valve opened
2/8/2011	10:10:42 AM	Helium MFC set to  0.000000
2/8/2011	10:10:42 AM	H2 MFC set to  0.000000
2/8/2011	10:10:42 AM	BCl3 MFC set to  0.000000
2/8/2011	10:10:42 AM	PHl3 MFC set to  0.000000
2/8/2011	10:10:42 AM	SiCl4 MFC set to  0.000000
2/8/2011	10:10:42 AM	Bypass solenoid MFC set to  0.000000
2/8/2011	10:10:42 AM	Tube furnace set to 0
2/8/2011	10:11:42 AM	H2 valve closed
2/8/2011	10:11:42 AM	BCl3 valve closed
2/8/2011	10:11:42 AM	PH3 valve closed
2/8/2011	10:11:42 AM	SiCl4 pre valve closed
2/8/2011	10:11:42 AM	SiCl4 post valve closed
2/8/2011	10:11:42 AM	Bubbler valve closed
2/8/2011	10:11:42 AM	Helium valve opened
2/8/2011	10:11:42 AM	Main Vac valve opened
2/8/2011	10:11:42 AM	Bypass valve opened
2/8/2011	10:11:42 AM	Helium MFC set to  100.000000
2/8/2011	10:11:42 AM	H2 MFC set to  0.000000
2/8/2011	10:11:42 AM	BCl3 MFC set to  0.000000
2/8/2011	10:11:42 AM	PHl3 MFC set to  0.000000
2/8/2011	10:11:42 AM	SiCl4 MFC set to  0.000000
2/8/2011	10:11:42 AM	Bypass solenoid MFC set to  0.000000
2/8/2011	10:11:42 AM	Tube furnace set to 0
2/8/2011	10:12:42 AM	Helium valve closed
2/8/2011	10:12:42 AM	H2 valve closed
2/8/2011	10:12:42 AM	BCl3 valve closed
2/8/2011	10:12:42 AM	PH3 valve closed
2/8/2011	10:12:42 AM	SiCl4 pre valve closed
2/8/2011	10:12:42 AM	SiCl4 post valve closed
2/8/2011	10:12:42 AM	Bubbler valve closed
2/8/2011	10:12:42 AM	Main Vac valve opened
2/8/2011	10:12:42 AM	Bypass valve opened
2/8/2011	10:12:42 AM	Helium MFC set to  0.000000
2/8/2011	10:12:42 AM	H2 MFC set to  0.000000
2/8/2011	10:12:42 AM	BCl3 MFC set to  0.000000
2/8/2011	10:12:42 AM	PHl3 MFC set to  0.000000
2/8/2011	10:12:42 AM	SiCl4 MFC set to  0.000000
2/8/2011	10:12:42 AM	Bypass solenoid MFC set to  0.000000
2/8/2011	10:12:43 AM	Tube furnace set to 0
2/8/2011	10:13:43 AM	H2 valve closed
2/8/2011	10:13:43 AM	BCl3 valve closed
2/8/2011	10:13:43 AM	PH3 valve closed
2/8/2011	10:13:43 AM	SiCl4 pre valve closed
2/8/2011	10:13:43 AM	SiCl4 post valve closed
2/8/2011	10:13:43 AM	Bubbler valve closed
2/8/2011	10:13:43 AM	Helium valve opened
2/8/2011	10:13:43 AM	Main Vac valve opened
2/8/2011	10:13:43 AM	Bypass valve opened
2/8/2011	10:13:43 AM	Helium MFC set to  100.000000
2/8/2011	10:13:43 AM	H2 MFC set to  0.000000
2/8/2011	10:13:43 AM	BCl3 MFC set to  0.000000
2/8/2011	10:13:43 AM	PHl3 MFC set to  0.000000
2/8/2011	10:13:43 AM	SiCl4 MFC set to  0.000000
2/8/2011	10:13:43 AM	Bypass solenoid MFC set to  0.000000
2/8/2011	10:13:43 AM	Tube furnace set to 0
2/8/2011	10:14:43 AM	Helium valve closed
2/8/2011	10:14:43 AM	H2 valve closed
2/8/2011	10:14:43 AM	BCl3 valve closed
2/8/2011	10:14:43 AM	PH3 valve closed
2/8/2011	10:14:43 AM	SiCl4 pre valve closed
2/8/2011	10:14:43 AM	SiCl4 post valve closed
2/8/2011	10:14:43 AM	Bubbler valve closed
2/8/2011	10:14:43 AM	Main Vac valve opened
2/8/2011	10:14:43 AM	Bypass valve opened
2/8/2011	10:14:43 AM	Helium MFC set to  0.000000
2/8/2011	10:14:43 AM	H2 MFC set to  0.000000
2/8/2011	10:14:43 AM	BCl3 MFC set to  0.000000
2/8/2011	10:14:43 AM	PHl3 MFC set to  0.000000
2/8/2011	10:14:43 AM	SiCl4 MFC set to  0.000000
2/8/2011	10:14:43 AM	Bypass solenoid MFC set to  0.000000
2/8/2011	10:14:43 AM	Tube furnace set to 0
2/8/2011	10:15:43 AM	H2 valve closed
2/8/2011	10:15:43 AM	BCl3 valve closed
2/8/2011	10:15:43 AM	PH3 valve closed
2/8/2011	10:15:43 AM	SiCl4 pre valve closed
2/8/2011	10:15:43 AM	SiCl4 post valve closed
2/8/2011	10:15:43 AM	Bubbler valve closed
2/8/2011	10:15:43 AM	Helium valve opened
2/8/2011	10:15:43 AM	Main Vac valve opened
2/8/2011	10:15:43 AM	Bypass valve opened
2/8/2011	10:15:43 AM	Helium MFC set to  100.000000
2/8/2011	10:15:43 AM	H2 MFC set to  0.000000
2/8/2011	10:15:43 AM	BCl3 MFC set to  0.000000
2/8/2011	10:15:43 AM	PHl3 MFC set to  0.000000
2/8/2011	10:15:43 AM	SiCl4 MFC set to  0.000000
2/8/2011	10:15:43 AM	Bypass solenoid MFC set to  0.000000
2/8/2011	10:15:43 AM	Tube furnace set to 0
2/8/2011	10:16:43 AM	Helium valve closed
2/8/2011	10:16:43 AM	H2 valve closed
2/8/2011	10:16:43 AM	BCl3 valve closed
2/8/2011	10:16:43 AM	PH3 valve closed
2/8/2011	10:16:43 AM	SiCl4 pre valve closed
2/8/2011	10:16:43 AM	SiCl4 post valve closed
2/8/2011	10:16:43 AM	Bubbler valve closed
2/8/2011	10:16:43 AM	Main Vac valve opened
2/8/2011	10:16:43 AM	Bypass valve opened
2/8/2011	10:16:43 AM	Helium MFC set to  0.000000
2/8/2011	10:16:43 AM	H2 MFC set to  0.000000
2/8/2011	10:16:43 AM	BCl3 MFC set to  0.000000
2/8/2011	10:16:43 AM	PHl3 MFC set to  0.000000
2/8/2011	10:16:43 AM	SiCl4 MFC set to  0.000000
2/8/2011	10:16:43 AM	Bypass solenoid MFC set to  0.000000
2/8/2011	10:16:43 AM	Tube furnace set to 0
2/8/2011	10:17:43 AM	H2 valve closed
2/8/2011	10:17:43 AM	BCl3 valve closed
2/8/2011	10:17:43 AM	PH3 valve closed
2/8/2011	10:17:43 AM	SiCl4 pre valve closed
2/8/2011	10:17:43 AM	SiCl4 post valve closed
2/8/2011	10:17:43 AM	Bubbler valve closed
2/8/2011	10:17:43 AM	Helium valve opened
2/8/2011	10:17:43 AM	Main Vac valve opened
2/8/2011	10:17:43 AM	Bypass valve opened
2/8/2011	10:17:43 AM	Helium MFC set to  100.000000
2/8/2011	10:17:43 AM	H2 MFC set to  0.000000
2/8/2011	10:17:43 AM	BCl3 MFC set to  0.000000
2/8/2011	10:17:43 AM	PHl3 MFC set to  0.000000
2/8/2011	10:17:43 AM	SiCl4 MFC set to  0.000000
2/8/2011	10:17:43 AM	Bypass solenoid MFC set to  0.000000
2/8/2011	10:17:44 AM	Tube furnace set to 0
2/8/2011	10:18:44 AM	Helium valve closed
2/8/2011	10:18:44 AM	H2 valve closed
2/8/2011	10:18:44 AM	BCl3 valve closed
2/8/2011	10:18:44 AM	PH3 valve closed
2/8/2011	10:18:44 AM	SiCl4 pre valve closed
2/8/2011	10:18:44 AM	SiCl4 post valve closed
2/8/2011	10:18:44 AM	Bubbler valve closed
2/8/2011	10:18:44 AM	Main Vac valve opened
2/8/2011	10:18:44 AM	Bypass valve opened
2/8/2011	10:18:44 AM	Helium MFC set to  0.000000
2/8/2011	10:18:44 AM	H2 MFC set to  0.000000
2/8/2011	10:18:44 AM	BCl3 MFC set to  0.000000
2/8/2011	10:18:44 AM	PHl3 MFC set to  0.000000
2/8/2011	10:18:44 AM	SiCl4 MFC set to  0.000000
2/8/2011	10:18:44 AM	Bypass solenoid MFC set to  0.000000
2/8/2011	10:18:44 AM	Tube furnace set to 0
2/8/2011	10:19:44 AM	H2 valve closed
2/8/2011	10:19:44 AM	BCl3 valve closed
2/8/2011	10:19:44 AM	PH3 valve closed
2/8/2011	10:19:44 AM	SiCl4 pre valve closed
2/8/2011	10:19:44 AM	SiCl4 post valve closed
2/8/2011	10:19:44 AM	Bubbler valve closed
2/8/2011	10:19:44 AM	Helium valve opened
2/8/2011	10:19:44 AM	Main Vac valve opened
2/8/2011	10:19:44 AM	Bypass valve opened
2/8/2011	10:19:44 AM	Helium MFC set to  100.000000
2/8/2011	10:19:44 AM	H2 MFC set to  0.000000
2/8/2011	10:19:44 AM	BCl3 MFC set to  0.000000
2/8/2011	10:19:44 AM	PHl3 MFC set to  0.000000
2/8/2011	10:19:44 AM	SiCl4 MFC set to  0.000000
2/8/2011	10:19:44 AM	Bypass solenoid MFC set to  0.000000
2/8/2011	10:19:44 AM	Tube furnace set to 0
2/8/2011	10:20:44 AM	Helium valve closed
2/8/2011	10:20:44 AM	H2 valve closed
2/8/2011	10:20:44 AM	BCl3 valve closed
2/8/2011	10:20:44 AM	PH3 valve closed
2/8/2011	10:20:44 AM	SiCl4 pre valve closed
2/8/2011	10:20:44 AM	SiCl4 post valve closed
2/8/2011	10:20:44 AM	Bubbler valve closed
2/8/2011	10:20:44 AM	Main Vac valve opened
2/8/2011	10:20:44 AM	Bypass valve opened
2/8/2011	10:20:44 AM	Helium MFC set to  0.000000
2/8/2011	10:20:44 AM	H2 MFC set to  0.000000
2/8/2011	10:20:44 AM	BCl3 MFC set to  0.000000
2/8/2011	10:20:44 AM	PHl3 MFC set to  0.000000
2/8/2011	10:20:44 AM	SiCl4 MFC set to  0.000000
2/8/2011	10:20:44 AM	Bypass solenoid MFC set to  0.000000
2/8/2011	10:20:44 AM	Tube furnace set to 0
2/8/2011	10:21:44 AM	H2 valve closed
2/8/2011	10:21:44 AM	BCl3 valve closed
2/8/2011	10:21:44 AM	PH3 valve closed
2/8/2011	10:21:44 AM	SiCl4 pre valve closed
2/8/2011	10:21:44 AM	SiCl4 post valve closed
2/8/2011	10:21:44 AM	Bubbler valve closed
2/8/2011	10:21:44 AM	Helium valve opened
2/8/2011	10:21:44 AM	Main Vac valve opened
2/8/2011	10:21:44 AM	Bypass valve opened
2/8/2011	10:21:44 AM	Helium MFC set to  100.000000
2/8/2011	10:21:44 AM	H2 MFC set to  0.000000
2/8/2011	10:21:44 AM	BCl3 MFC set to  0.000000
2/8/2011	10:21:44 AM	PHl3 MFC set to  0.000000
2/8/2011	10:21:44 AM	SiCl4 MFC set to  0.000000
2/8/2011	10:21:44 AM	Bypass solenoid MFC set to  0.000000
2/8/2011	10:21:44 AM	Tube furnace set to 0
2/8/2011	10:22:44 AM	Helium valve closed
2/8/2011	10:22:44 AM	H2 valve closed
2/8/2011	10:22:44 AM	BCl3 valve closed
2/8/2011	10:22:44 AM	PH3 valve closed
2/8/2011	10:22:44 AM	SiCl4 pre valve closed
2/8/2011	10:22:44 AM	SiCl4 post valve closed
2/8/2011	10:22:44 AM	Bubbler valve closed
2/8/2011	10:22:44 AM	Main Vac valve opened
2/8/2011	10:22:44 AM	Bypass valve opened
2/8/2011	10:22:44 AM	Helium MFC set to  0.000000
2/8/2011	10:22:44 AM	H2 MFC set to  0.000000
2/8/2011	10:22:44 AM	BCl3 MFC set to  0.000000
2/8/2011	10:22:44 AM	PHl3 MFC set to  0.000000
2/8/2011	10:22:44 AM	SiCl4 MFC set to  0.000000
2/8/2011	10:22:44 AM	Bypass solenoid MFC set to  0.000000
2/8/2011	10:22:45 AM	Tube furnace set to 0
2/8/2011	10:23:45 AM	H2 valve closed
2/8/2011	10:23:45 AM	BCl3 valve closed
2/8/2011	10:23:45 AM	PH3 valve closed
2/8/2011	10:23:45 AM	SiCl4 pre valve closed
2/8/2011	10:23:45 AM	SiCl4 post valve closed
2/8/2011	10:23:45 AM	Bubbler valve closed
2/8/2011	10:23:45 AM	Helium valve opened
2/8/2011	10:23:45 AM	Main Vac valve opened
2/8/2011	10:23:45 AM	Bypass valve opened
2/8/2011	10:23:45 AM	Helium MFC set to  100.000000
2/8/2011	10:23:45 AM	H2 MFC set to  0.000000
2/8/2011	10:23:45 AM	BCl3 MFC set to  0.000000
2/8/2011	10:23:45 AM	PHl3 MFC set to  0.000000
2/8/2011	10:23:45 AM	SiCl4 MFC set to  0.000000
2/8/2011	10:23:45 AM	Bypass solenoid MFC set to  0.000000
2/8/2011	10:23:45 AM	Tube furnace set to 0
2/8/2011	10:24:45 AM	Helium valve closed
2/8/2011	10:24:45 AM	H2 valve closed
2/8/2011	10:24:45 AM	BCl3 valve closed
2/8/2011	10:24:45 AM	PH3 valve closed
2/8/2011	10:24:45 AM	SiCl4 pre valve closed
2/8/2011	10:24:45 AM	SiCl4 post valve closed
2/8/2011	10:24:45 AM	Bubbler valve closed
2/8/2011	10:24:45 AM	Main Vac valve opened
2/8/2011	10:24:45 AM	Bypass valve opened
2/8/2011	10:24:45 AM	Helium MFC set to  0.000000
2/8/2011	10:24:45 AM	H2 MFC set to  0.000000
2/8/2011	10:24:45 AM	BCl3 MFC set to  0.000000
2/8/2011	10:24:45 AM	PHl3 MFC set to  0.000000
2/8/2011	10:24:45 AM	SiCl4 MFC set to  0.000000
2/8/2011	10:24:45 AM	Bypass solenoid MFC set to  0.000000
2/8/2011	10:24:45 AM	Tube furnace set to 0
2/8/2011	10:24:46 AM	Run finished at 10:24 AM
2/8/2011	10:24:46 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
2/8/2011	10:54:02 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
2/8/2011	10:54:02 AM	Recipe started at 10:54 AM
2/8/2011	10:54:02 AM	Helium valve closed
2/8/2011	10:54:02 AM	H2 valve closed
2/8/2011	10:54:02 AM	BCl3 valve closed
2/8/2011	10:54:02 AM	PH3 valve closed
2/8/2011	10:54:02 AM	SiCl4 pre valve closed
2/8/2011	10:54:02 AM	SiCl4 post valve closed
2/8/2011	10:54:02 AM	Main Vac valve closed
2/8/2011	10:54:02 AM	Bypass valve closed
2/8/2011	10:54:02 AM	Bubbler valve closed
2/8/2011	10:54:02 AM	Helium MFC set to  0.000000
2/8/2011	10:54:02 AM	H2 MFC set to  0.000000
2/8/2011	10:54:02 AM	BCl3 MFC set to  0.000000
2/8/2011	10:54:02 AM	PHl3 MFC set to  0.000000
2/8/2011	10:54:02 AM	SiCl4 MFC set to  0.000000
2/8/2011	10:54:02 AM	Bypass solenoid MFC set to  0.000000
2/8/2011	10:54:03 AM	Tube furnace set to 0
2/8/2011	10:54:03 AM	Run finished at 10:54 AM
2/8/2011	10:54:03 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
2/8/2011	10:54:18 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
2/8/2011	10:54:30 AM	Recipe started at 10:54 AM
2/8/2011	10:54:30 AM	Helium valve closed
2/8/2011	10:54:30 AM	H2 valve closed
2/8/2011	10:54:30 AM	BCl3 valve closed
2/8/2011	10:54:30 AM	PH3 valve closed
2/8/2011	10:54:30 AM	SiCl4 pre valve closed
2/8/2011	10:54:30 AM	SiCl4 post valve closed
2/8/2011	10:54:30 AM	Main Vac valve closed
2/8/2011	10:54:30 AM	Bubbler valve closed
2/8/2011	10:54:30 AM	Bypass valve opened
2/8/2011	10:54:30 AM	Helium MFC set to  0.000000
2/8/2011	10:54:30 AM	H2 MFC set to  0.000000
2/8/2011	10:54:30 AM	BCl3 MFC set to  0.000000
2/8/2011	10:54:30 AM	PHl3 MFC set to  0.000000
2/8/2011	10:54:30 AM	SiCl4 MFC set to  0.000000
2/8/2011	10:54:30 AM	Bypass solenoid MFC set to  0.000000
2/8/2011	10:54:30 AM	Tube furnace set to 0
2/8/2011	10:54:30 AM	Helium valve closed
2/8/2011	10:54:30 AM	H2 valve closed
2/8/2011	10:54:30 AM	BCl3 valve closed
2/8/2011	10:54:30 AM	PH3 valve closed
2/8/2011	10:54:30 AM	SiCl4 pre valve closed
2/8/2011	10:54:30 AM	SiCl4 post valve closed
2/8/2011	10:54:30 AM	Bubbler valve closed
2/8/2011	10:54:30 AM	Main Vac valve opened
2/8/2011	10:54:30 AM	Bypass valve opened
2/8/2011	10:54:30 AM	Helium MFC set to  0.000000
2/8/2011	10:54:30 AM	H2 MFC set to  0.000000
2/8/2011	10:54:30 AM	BCl3 MFC set to  0.000000
2/8/2011	10:54:30 AM	PHl3 MFC set to  0.000000
2/8/2011	10:54:30 AM	SiCl4 MFC set to  0.000000
2/8/2011	10:54:30 AM	Bypass solenoid MFC set to  0.000000
2/8/2011	10:54:31 AM	Tube furnace set to 0
2/8/2011	10:54:35 AM	H2 valve closed
2/8/2011	10:54:35 AM	BCl3 valve closed
2/8/2011	10:54:35 AM	PH3 valve closed
2/8/2011	10:54:35 AM	SiCl4 pre valve closed
2/8/2011	10:54:35 AM	SiCl4 post valve closed
2/8/2011	10:54:35 AM	Bubbler valve closed
2/8/2011	10:54:35 AM	Helium valve opened
2/8/2011	10:54:35 AM	Main Vac valve opened
2/8/2011	10:54:35 AM	Bypass valve opened
2/8/2011	10:54:35 AM	Helium MFC set to  100.000000
2/8/2011	10:54:35 AM	H2 MFC set to  0.000000
2/8/2011	10:54:35 AM	BCl3 MFC set to  0.000000
2/8/2011	10:54:35 AM	PHl3 MFC set to  0.000000
2/8/2011	10:54:35 AM	SiCl4 MFC set to  0.000000
2/8/2011	10:54:35 AM	Bypass solenoid MFC set to  0.000000
2/8/2011	10:54:35 AM	Tube furnace set to 0
2/8/2011	10:54:36 AM	Helium valve closed
2/8/2011	10:54:36 AM	H2 valve closed
2/8/2011	10:54:36 AM	BCl3 valve closed
2/8/2011	10:54:36 AM	PH3 valve closed
2/8/2011	10:54:36 AM	SiCl4 pre valve closed
2/8/2011	10:54:36 AM	SiCl4 post valve closed
2/8/2011	10:54:36 AM	Bubbler valve closed
2/8/2011	10:54:36 AM	Main Vac valve opened
2/8/2011	10:54:36 AM	Bypass valve opened
2/8/2011	10:54:36 AM	Helium MFC set to  0.000000
2/8/2011	10:54:36 AM	H2 MFC set to  0.000000
2/8/2011	10:54:36 AM	BCl3 MFC set to  0.000000
2/8/2011	10:54:36 AM	PHl3 MFC set to  0.000000
2/8/2011	10:54:36 AM	SiCl4 MFC set to  0.000000
2/8/2011	10:54:36 AM	Bypass solenoid MFC set to  0.000000
2/8/2011	10:54:36 AM	Tube furnace set to 0
2/8/2011	10:54:37 AM	H2 valve closed
2/8/2011	10:54:37 AM	BCl3 valve closed
2/8/2011	10:54:37 AM	PH3 valve closed
2/8/2011	10:54:37 AM	SiCl4 pre valve closed
2/8/2011	10:54:37 AM	SiCl4 post valve closed
2/8/2011	10:54:37 AM	Bubbler valve closed
2/8/2011	10:54:37 AM	Helium valve opened
2/8/2011	10:54:37 AM	Main Vac valve opened
2/8/2011	10:54:37 AM	Bypass valve opened
2/8/2011	10:54:37 AM	Helium MFC set to  100.000000
2/8/2011	10:54:37 AM	H2 MFC set to  0.000000
2/8/2011	10:54:37 AM	BCl3 MFC set to  0.000000
2/8/2011	10:54:37 AM	PHl3 MFC set to  0.000000
2/8/2011	10:54:37 AM	SiCl4 MFC set to  0.000000
2/8/2011	10:54:37 AM	Bypass solenoid MFC set to  0.000000
2/8/2011	10:54:37 AM	Tube furnace set to 0
2/8/2011	10:54:38 AM	Helium valve closed
2/8/2011	10:54:38 AM	H2 valve closed
2/8/2011	10:54:38 AM	BCl3 valve closed
2/8/2011	10:54:38 AM	PH3 valve closed
2/8/2011	10:54:38 AM	SiCl4 pre valve closed
2/8/2011	10:54:38 AM	SiCl4 post valve closed
2/8/2011	10:54:38 AM	Bubbler valve closed
2/8/2011	10:54:38 AM	Main Vac valve opened
2/8/2011	10:54:38 AM	Bypass valve opened
2/8/2011	10:54:38 AM	Helium MFC set to  0.000000
2/8/2011	10:54:38 AM	H2 MFC set to  0.000000
2/8/2011	10:54:38 AM	BCl3 MFC set to  0.000000
2/8/2011	10:54:38 AM	PHl3 MFC set to  0.000000
2/8/2011	10:54:38 AM	SiCl4 MFC set to  0.000000
2/8/2011	10:54:38 AM	Bypass solenoid MFC set to  0.000000
2/8/2011	10:54:38 AM	Tube furnace set to 0
2/8/2011	10:54:39 AM	H2 valve closed
2/8/2011	10:54:39 AM	BCl3 valve closed
2/8/2011	10:54:39 AM	PH3 valve closed
2/8/2011	10:54:39 AM	SiCl4 pre valve closed
2/8/2011	10:54:39 AM	SiCl4 post valve closed
2/8/2011	10:54:39 AM	Bubbler valve closed
2/8/2011	10:54:39 AM	Helium valve opened
2/8/2011	10:54:39 AM	Main Vac valve opened
2/8/2011	10:54:39 AM	Bypass valve opened
2/8/2011	10:54:39 AM	Helium MFC set to  100.000000
2/8/2011	10:54:39 AM	H2 MFC set to  0.000000
2/8/2011	10:54:39 AM	BCl3 MFC set to  0.000000
2/8/2011	10:54:39 AM	PHl3 MFC set to  0.000000
2/8/2011	10:54:39 AM	SiCl4 MFC set to  0.000000
2/8/2011	10:54:39 AM	Bypass solenoid MFC set to  0.000000
2/8/2011	10:54:39 AM	Tube furnace set to 0
2/8/2011	10:54:40 AM	Helium valve closed
2/8/2011	10:54:40 AM	H2 valve closed
2/8/2011	10:54:40 AM	BCl3 valve closed
2/8/2011	10:54:40 AM	PH3 valve closed
2/8/2011	10:54:40 AM	SiCl4 pre valve closed
2/8/2011	10:54:40 AM	SiCl4 post valve closed
2/8/2011	10:54:40 AM	Bubbler valve closed
2/8/2011	10:54:40 AM	Main Vac valve opened
2/8/2011	10:54:40 AM	Bypass valve opened
2/8/2011	10:54:40 AM	Helium MFC set to  0.000000
2/8/2011	10:54:40 AM	H2 MFC set to  0.000000
2/8/2011	10:54:40 AM	BCl3 MFC set to  0.000000
2/8/2011	10:54:40 AM	PHl3 MFC set to  0.000000
2/8/2011	10:54:40 AM	SiCl4 MFC set to  0.000000
2/8/2011	10:54:40 AM	Bypass solenoid MFC set to  0.000000
2/8/2011	10:54:40 AM	Tube furnace set to 0
2/8/2011	10:54:41 AM	H2 valve closed
2/8/2011	10:54:41 AM	BCl3 valve closed
2/8/2011	10:54:41 AM	PH3 valve closed
2/8/2011	10:54:41 AM	SiCl4 pre valve closed
2/8/2011	10:54:41 AM	SiCl4 post valve closed
2/8/2011	10:54:41 AM	Bubbler valve closed
2/8/2011	10:54:41 AM	Helium valve opened
2/8/2011	10:54:41 AM	Main Vac valve opened
2/8/2011	10:54:41 AM	Bypass valve opened
2/8/2011	10:54:41 AM	Helium MFC set to  100.000000
2/8/2011	10:54:41 AM	H2 MFC set to  0.000000
2/8/2011	10:54:41 AM	BCl3 MFC set to  0.000000
2/8/2011	10:54:41 AM	PHl3 MFC set to  0.000000
2/8/2011	10:54:41 AM	SiCl4 MFC set to  0.000000
2/8/2011	10:54:41 AM	Bypass solenoid MFC set to  0.000000
2/8/2011	10:54:41 AM	Tube furnace set to 0
2/8/2011	10:54:42 AM	Helium valve closed
2/8/2011	10:54:42 AM	H2 valve closed
2/8/2011	10:54:42 AM	BCl3 valve closed
2/8/2011	10:54:42 AM	PH3 valve closed
2/8/2011	10:54:42 AM	SiCl4 pre valve closed
2/8/2011	10:54:42 AM	SiCl4 post valve closed
2/8/2011	10:54:42 AM	Bubbler valve closed
2/8/2011	10:54:42 AM	Main Vac valve opened
2/8/2011	10:54:42 AM	Bypass valve opened
2/8/2011	10:54:42 AM	Helium MFC set to  0.000000
2/8/2011	10:54:42 AM	H2 MFC set to  0.000000
2/8/2011	10:54:42 AM	BCl3 MFC set to  0.000000
2/8/2011	10:54:42 AM	PHl3 MFC set to  0.000000
2/8/2011	10:54:42 AM	SiCl4 MFC set to  0.000000
2/8/2011	10:54:42 AM	Bypass solenoid MFC set to  0.000000
2/8/2011	10:54:42 AM	Tube furnace set to 0
2/8/2011	10:54:43 AM	H2 valve closed
2/8/2011	10:54:43 AM	BCl3 valve closed
2/8/2011	10:54:43 AM	PH3 valve closed
2/8/2011	10:54:43 AM	SiCl4 pre valve closed
2/8/2011	10:54:43 AM	SiCl4 post valve closed
2/8/2011	10:54:43 AM	Bubbler valve closed
2/8/2011	10:54:43 AM	Helium valve opened
2/8/2011	10:54:43 AM	Main Vac valve opened
2/8/2011	10:54:43 AM	Bypass valve opened
2/8/2011	10:54:43 AM	Helium MFC set to  100.000000
2/8/2011	10:54:43 AM	H2 MFC set to  0.000000
2/8/2011	10:54:43 AM	BCl3 MFC set to  0.000000
2/8/2011	10:54:43 AM	PHl3 MFC set to  0.000000
2/8/2011	10:54:43 AM	SiCl4 MFC set to  0.000000
2/8/2011	10:54:43 AM	Bypass solenoid MFC set to  0.000000
2/8/2011	10:54:43 AM	Tube furnace set to 0
2/8/2011	10:54:44 AM	Helium valve closed
2/8/2011	10:54:44 AM	H2 valve closed
2/8/2011	10:54:44 AM	BCl3 valve closed
2/8/2011	10:54:44 AM	PH3 valve closed
2/8/2011	10:54:44 AM	SiCl4 pre valve closed
2/8/2011	10:54:44 AM	SiCl4 post valve closed
2/8/2011	10:54:44 AM	Bubbler valve closed
2/8/2011	10:54:44 AM	Main Vac valve opened
2/8/2011	10:54:44 AM	Bypass valve opened
2/8/2011	10:54:44 AM	Helium MFC set to  0.000000
2/8/2011	10:54:44 AM	H2 MFC set to  0.000000
2/8/2011	10:54:44 AM	BCl3 MFC set to  0.000000
2/8/2011	10:54:44 AM	PHl3 MFC set to  0.000000
2/8/2011	10:54:44 AM	SiCl4 MFC set to  0.000000
2/8/2011	10:54:44 AM	Bypass solenoid MFC set to  0.000000
2/8/2011	10:54:44 AM	Tube furnace set to 0
2/8/2011	10:54:49 AM	H2 valve closed
2/8/2011	10:54:49 AM	BCl3 valve closed
2/8/2011	10:54:49 AM	PH3 valve closed
2/8/2011	10:54:49 AM	SiCl4 pre valve closed
2/8/2011	10:54:49 AM	SiCl4 post valve closed
2/8/2011	10:54:49 AM	Bubbler valve closed
2/8/2011	10:54:49 AM	Helium valve opened
2/8/2011	10:54:49 AM	Main Vac valve opened
2/8/2011	10:54:49 AM	Bypass valve opened
2/8/2011	10:54:49 AM	Helium MFC set to  100.000000
2/8/2011	10:54:49 AM	H2 MFC set to  0.000000
2/8/2011	10:54:49 AM	BCl3 MFC set to  0.000000
2/8/2011	10:54:49 AM	PHl3 MFC set to  0.000000
2/8/2011	10:54:49 AM	SiCl4 MFC set to  0.000000
2/8/2011	10:54:49 AM	Bypass solenoid MFC set to  0.000000
2/8/2011	10:54:49 AM	Tube furnace set to 0
2/8/2011	10:55:49 AM	Helium valve closed
2/8/2011	10:55:49 AM	H2 valve closed
2/8/2011	10:55:49 AM	BCl3 valve closed
2/8/2011	10:55:49 AM	PH3 valve closed
2/8/2011	10:55:49 AM	SiCl4 pre valve closed
2/8/2011	10:55:49 AM	SiCl4 post valve closed
2/8/2011	10:55:49 AM	Bubbler valve closed
2/8/2011	10:55:49 AM	Main Vac valve opened
2/8/2011	10:55:49 AM	Bypass valve opened
2/8/2011	10:55:49 AM	Helium MFC set to  0.000000
2/8/2011	10:55:49 AM	H2 MFC set to  0.000000
2/8/2011	10:55:49 AM	BCl3 MFC set to  0.000000
2/8/2011	10:55:49 AM	PHl3 MFC set to  0.000000
2/8/2011	10:55:49 AM	SiCl4 MFC set to  0.000000
2/8/2011	10:55:49 AM	Bypass solenoid MFC set to  0.000000
2/8/2011	10:55:49 AM	Tube furnace set to 0
2/8/2011	10:56:49 AM	H2 valve closed
2/8/2011	10:56:49 AM	BCl3 valve closed
2/8/2011	10:56:49 AM	PH3 valve closed
2/8/2011	10:56:49 AM	SiCl4 pre valve closed
2/8/2011	10:56:49 AM	SiCl4 post valve closed
2/8/2011	10:56:49 AM	Bubbler valve closed
2/8/2011	10:56:49 AM	Helium valve opened
2/8/2011	10:56:49 AM	Main Vac valve opened
2/8/2011	10:56:49 AM	Bypass valve opened
2/8/2011	10:56:49 AM	Helium MFC set to  100.000000
2/8/2011	10:56:49 AM	H2 MFC set to  0.000000
2/8/2011	10:56:49 AM	BCl3 MFC set to  0.000000
2/8/2011	10:56:49 AM	PHl3 MFC set to  0.000000
2/8/2011	10:56:49 AM	SiCl4 MFC set to  0.000000
2/8/2011	10:56:49 AM	Bypass solenoid MFC set to  0.000000
2/8/2011	10:56:49 AM	Tube furnace set to 0
2/8/2011	10:57:49 AM	Helium valve closed
2/8/2011	10:57:49 AM	H2 valve closed
2/8/2011	10:57:49 AM	BCl3 valve closed
2/8/2011	10:57:49 AM	PH3 valve closed
2/8/2011	10:57:49 AM	SiCl4 pre valve closed
2/8/2011	10:57:49 AM	SiCl4 post valve closed
2/8/2011	10:57:49 AM	Bubbler valve closed
2/8/2011	10:57:49 AM	Main Vac valve opened
2/8/2011	10:57:49 AM	Bypass valve opened
2/8/2011	10:57:49 AM	Helium MFC set to  0.000000
2/8/2011	10:57:49 AM	H2 MFC set to  0.000000
2/8/2011	10:57:49 AM	BCl3 MFC set to  0.000000
2/8/2011	10:57:49 AM	PHl3 MFC set to  0.000000
2/8/2011	10:57:49 AM	SiCl4 MFC set to  0.000000
2/8/2011	10:57:49 AM	Bypass solenoid MFC set to  0.000000
2/8/2011	10:57:50 AM	Tube furnace set to 0
2/8/2011	10:58:50 AM	H2 valve closed
2/8/2011	10:58:50 AM	BCl3 valve closed
2/8/2011	10:58:50 AM	PH3 valve closed
2/8/2011	10:58:50 AM	SiCl4 pre valve closed
2/8/2011	10:58:50 AM	SiCl4 post valve closed
2/8/2011	10:58:50 AM	Bubbler valve closed
2/8/2011	10:58:50 AM	Helium valve opened
2/8/2011	10:58:50 AM	Main Vac valve opened
2/8/2011	10:58:50 AM	Bypass valve opened
2/8/2011	10:58:50 AM	Helium MFC set to  100.000000
2/8/2011	10:58:50 AM	H2 MFC set to  0.000000
2/8/2011	10:58:50 AM	BCl3 MFC set to  0.000000
2/8/2011	10:58:50 AM	PHl3 MFC set to  0.000000
2/8/2011	10:58:50 AM	SiCl4 MFC set to  0.000000
2/8/2011	10:58:50 AM	Bypass solenoid MFC set to  0.000000
2/8/2011	10:58:50 AM	Tube furnace set to 0
2/8/2011	10:59:50 AM	Helium valve closed
2/8/2011	10:59:50 AM	H2 valve closed
2/8/2011	10:59:50 AM	BCl3 valve closed
2/8/2011	10:59:50 AM	PH3 valve closed
2/8/2011	10:59:50 AM	SiCl4 pre valve closed
2/8/2011	10:59:50 AM	SiCl4 post valve closed
2/8/2011	10:59:50 AM	Bubbler valve closed
2/8/2011	10:59:50 AM	Main Vac valve opened
2/8/2011	10:59:50 AM	Bypass valve opened
2/8/2011	10:59:50 AM	Helium MFC set to  0.000000
2/8/2011	10:59:50 AM	H2 MFC set to  0.000000
2/8/2011	10:59:50 AM	BCl3 MFC set to  0.000000
2/8/2011	10:59:50 AM	PHl3 MFC set to  0.000000
2/8/2011	10:59:50 AM	SiCl4 MFC set to  0.000000
2/8/2011	10:59:50 AM	Bypass solenoid MFC set to  0.000000
2/8/2011	10:59:50 AM	Tube furnace set to 0
2/8/2011	11:00:50 AM	H2 valve closed
2/8/2011	11:00:50 AM	BCl3 valve closed
2/8/2011	11:00:50 AM	PH3 valve closed
2/8/2011	11:00:50 AM	SiCl4 pre valve closed
2/8/2011	11:00:50 AM	SiCl4 post valve closed
2/8/2011	11:00:50 AM	Bubbler valve closed
2/8/2011	11:00:50 AM	Helium valve opened
2/8/2011	11:00:50 AM	Main Vac valve opened
2/8/2011	11:00:50 AM	Bypass valve opened
2/8/2011	11:00:50 AM	Helium MFC set to  100.000000
2/8/2011	11:00:50 AM	H2 MFC set to  0.000000
2/8/2011	11:00:50 AM	BCl3 MFC set to  0.000000
2/8/2011	11:00:50 AM	PHl3 MFC set to  0.000000
2/8/2011	11:00:50 AM	SiCl4 MFC set to  0.000000
2/8/2011	11:00:50 AM	Bypass solenoid MFC set to  0.000000
2/8/2011	11:00:50 AM	Tube furnace set to 0
2/8/2011	11:01:50 AM	Helium valve closed
2/8/2011	11:01:50 AM	H2 valve closed
2/8/2011	11:01:50 AM	BCl3 valve closed
2/8/2011	11:01:50 AM	PH3 valve closed
2/8/2011	11:01:50 AM	SiCl4 pre valve closed
2/8/2011	11:01:50 AM	SiCl4 post valve closed
2/8/2011	11:01:50 AM	Bubbler valve closed
2/8/2011	11:01:50 AM	Main Vac valve opened
2/8/2011	11:01:50 AM	Bypass valve opened
2/8/2011	11:01:50 AM	Helium MFC set to  0.000000
2/8/2011	11:01:50 AM	H2 MFC set to  0.000000
2/8/2011	11:01:50 AM	BCl3 MFC set to  0.000000
2/8/2011	11:01:50 AM	PHl3 MFC set to  0.000000
2/8/2011	11:01:50 AM	SiCl4 MFC set to  0.000000
2/8/2011	11:01:50 AM	Bypass solenoid MFC set to  0.000000
2/8/2011	11:01:50 AM	Tube furnace set to 0
2/8/2011	11:02:50 AM	H2 valve closed
2/8/2011	11:02:50 AM	BCl3 valve closed
2/8/2011	11:02:50 AM	PH3 valve closed
2/8/2011	11:02:50 AM	SiCl4 pre valve closed
2/8/2011	11:02:50 AM	SiCl4 post valve closed
2/8/2011	11:02:50 AM	Bubbler valve closed
2/8/2011	11:02:50 AM	Helium valve opened
2/8/2011	11:02:50 AM	Main Vac valve opened
2/8/2011	11:02:50 AM	Bypass valve opened
2/8/2011	11:02:50 AM	Helium MFC set to  100.000000
2/8/2011	11:02:50 AM	H2 MFC set to  0.000000
2/8/2011	11:02:50 AM	BCl3 MFC set to  0.000000
2/8/2011	11:02:50 AM	PHl3 MFC set to  0.000000
2/8/2011	11:02:50 AM	SiCl4 MFC set to  0.000000
2/8/2011	11:02:50 AM	Bypass solenoid MFC set to  0.000000
2/8/2011	11:02:51 AM	Tube furnace set to 0
2/8/2011	11:03:51 AM	Helium valve closed
2/8/2011	11:03:51 AM	H2 valve closed
2/8/2011	11:03:51 AM	BCl3 valve closed
2/8/2011	11:03:51 AM	PH3 valve closed
2/8/2011	11:03:51 AM	SiCl4 pre valve closed
2/8/2011	11:03:51 AM	SiCl4 post valve closed
2/8/2011	11:03:51 AM	Bubbler valve closed
2/8/2011	11:03:51 AM	Main Vac valve opened
2/8/2011	11:03:51 AM	Bypass valve opened
2/8/2011	11:03:51 AM	Helium MFC set to  0.000000
2/8/2011	11:03:51 AM	H2 MFC set to  0.000000
2/8/2011	11:03:51 AM	BCl3 MFC set to  0.000000
2/8/2011	11:03:51 AM	PHl3 MFC set to  0.000000
2/8/2011	11:03:51 AM	SiCl4 MFC set to  0.000000
2/8/2011	11:03:51 AM	Bypass solenoid MFC set to  0.000000
2/8/2011	11:03:51 AM	Tube furnace set to 0
2/8/2011	11:03:52 AM	Run finished at 11:03 AM
2/8/2011	11:03:52 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
2/8/2011	11:07:45 AM	Recipe started at 11:07 AM
2/8/2011	11:07:45 AM	Helium valve closed
2/8/2011	11:07:45 AM	BCl3 valve closed
2/8/2011	11:07:45 AM	PH3 valve closed
2/8/2011	11:07:45 AM	SiCl4 pre valve closed
2/8/2011	11:07:45 AM	SiCl4 post valve closed
2/8/2011	11:07:45 AM	Main Vac valve closed
2/8/2011	11:07:45 AM	Bypass valve closed
2/8/2011	11:07:45 AM	Bubbler valve closed
2/8/2011	11:07:45 AM	H2 valve opened
2/8/2011	11:07:45 AM	Helium MFC set to  0.000000
2/8/2011	11:07:45 AM	H2 MFC set to  500.000000
2/8/2011	11:07:45 AM	BCl3 MFC set to  0.000000
2/8/2011	11:07:45 AM	PHl3 MFC set to  0.000000
2/8/2011	11:07:45 AM	SiCl4 MFC set to  0.000000
2/8/2011	11:07:45 AM	Bypass solenoid MFC set to  0.000000
2/8/2011	11:07:45 AM	Tube furnace set to 0
2/8/2011	11:09:07 AM	Helium valve closed
2/8/2011	11:09:07 AM	BCl3 valve closed
2/8/2011	11:09:07 AM	PH3 valve closed
2/8/2011	11:09:07 AM	SiCl4 pre valve closed
2/8/2011	11:09:07 AM	SiCl4 post valve closed
2/8/2011	11:09:07 AM	Main Vac valve closed
2/8/2011	11:09:07 AM	Bypass valve closed
2/8/2011	11:09:07 AM	H2 valve opened
2/8/2011	11:09:07 AM	Bubbler valve opened
2/8/2011	11:09:07 AM	Helium MFC set to  0.000000
2/8/2011	11:09:07 AM	H2 MFC set to  500.000000
2/8/2011	11:09:07 AM	BCl3 MFC set to  0.000000
2/8/2011	11:09:07 AM	PHl3 MFC set to  0.000000
2/8/2011	11:09:07 AM	SiCl4 MFC set to  0.000000
2/8/2011	11:09:07 AM	Bypass solenoid MFC set to  0.000000
2/8/2011	11:09:07 AM	Tube furnace set to 1000
2/8/2011	11:29:07 AM	Helium valve closed
2/8/2011	11:29:07 AM	BCl3 valve closed
2/8/2011	11:29:07 AM	PH3 valve closed
2/8/2011	11:29:07 AM	Main Vac valve closed
2/8/2011	11:29:07 AM	Bypass valve closed
2/8/2011	11:29:07 AM	H2 valve opened
2/8/2011	11:29:07 AM	SiCl4 pre valve opened
2/8/2011	11:29:07 AM	SiCl4 post valve opened
2/8/2011	11:29:07 AM	Bubbler valve opened
2/8/2011	11:29:07 AM	Helium MFC set to  0.000000
2/8/2011	11:29:07 AM	H2 MFC set to  300.000000
2/8/2011	11:29:07 AM	BCl3 MFC set to  0.000000
2/8/2011	11:29:07 AM	PHl3 MFC set to  0.000000
2/8/2011	11:29:07 AM	SiCl4 MFC set to  30.000000
2/8/2011	11:29:07 AM	Bypass solenoid MFC set to  0.000000
2/8/2011	11:29:08 AM	Tube furnace set to 1000
2/8/2011	11:44:08 AM	H2 valve closed
2/8/2011	11:44:08 AM	BCl3 valve closed
2/8/2011	11:44:08 AM	PH3 valve closed
2/8/2011	11:44:08 AM	SiCl4 pre valve closed
2/8/2011	11:44:08 AM	SiCl4 post valve closed
2/8/2011	11:44:08 AM	Main Vac valve closed
2/8/2011	11:44:08 AM	Bypass valve closed
2/8/2011	11:44:08 AM	Helium valve opened
2/8/2011	11:44:08 AM	Bubbler valve opened
2/8/2011	11:44:08 AM	Helium MFC set to  500.000000
2/8/2011	11:44:08 AM	H2 MFC set to  0.000000
2/8/2011	11:44:08 AM	BCl3 MFC set to  0.000000
2/8/2011	11:44:08 AM	PHl3 MFC set to  0.000000
2/8/2011	11:44:08 AM	SiCl4 MFC set to  0.000000
2/8/2011	11:44:08 AM	Bypass solenoid MFC set to  0.000000
2/8/2011	11:44:08 AM	Tube furnace set to 0
2/8/2011	11:54:12 AM	Helium valve closed
2/8/2011	11:54:12 AM	H2 valve closed
2/8/2011	11:54:12 AM	BCl3 valve closed
2/8/2011	11:54:12 AM	PH3 valve closed
2/8/2011	11:54:12 AM	SiCl4 pre valve closed
2/8/2011	11:54:12 AM	SiCl4 post valve closed
2/8/2011	11:54:12 AM	Main Vac valve closed
2/8/2011	11:54:12 AM	Bypass valve closed
2/8/2011	11:54:12 AM	Bubbler valve closed
2/8/2011	11:54:12 AM	Helium MFC set to  0.000000
2/8/2011	11:54:12 AM	H2 MFC set to  0.000000
2/8/2011	11:54:12 AM	BCl3 MFC set to  0.000000
2/8/2011	11:54:12 AM	PHl3 MFC set to  0.000000
2/8/2011	11:54:12 AM	SiCl4 MFC set to  0.000000
2/8/2011	11:54:12 AM	Bypass solenoid MFC set to  0.000000
2/8/2011	11:54:12 AM	Tube furnace set to 0
2/8/2011	11:54:12 AM	Run finished at 11:54 AM
2/8/2011	11:59:22 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/8/2011	11:59:22 AM	Recipe started at 11:59 AM
2/8/2011	11:59:22 AM	Helium valve closed
2/8/2011	11:59:22 AM	H2 valve closed
2/8/2011	11:59:22 AM	BCl3 valve closed
2/8/2011	11:59:22 AM	PH3 valve closed
2/8/2011	11:59:22 AM	SiCl4 pre valve closed
2/8/2011	11:59:22 AM	SiCl4 post valve closed
2/8/2011	11:59:22 AM	Main Vac valve closed
2/8/2011	11:59:22 AM	Bubbler valve closed
2/8/2011	11:59:22 AM	Bypass valve opened
2/8/2011	11:59:22 AM	Helium MFC set to  0.000000
2/8/2011	11:59:22 AM	H2 MFC set to  0.000000
2/8/2011	11:59:22 AM	BCl3 MFC set to  0.000000
2/8/2011	11:59:22 AM	PHl3 MFC set to  0.000000
2/8/2011	11:59:22 AM	SiCl4 MFC set to  0.000000
2/8/2011	11:59:22 AM	Bypass solenoid MFC set to  0.000000
2/8/2011	11:59:23 AM	Tube furnace set to 0
2/8/2011	11:59:54 AM	Helium valve closed
2/8/2011	11:59:54 AM	H2 valve closed
2/8/2011	11:59:54 AM	BCl3 valve closed
2/8/2011	11:59:54 AM	PH3 valve closed
2/8/2011	11:59:54 AM	SiCl4 pre valve closed
2/8/2011	11:59:54 AM	SiCl4 post valve closed
2/8/2011	11:59:54 AM	Bubbler valve closed
2/8/2011	11:59:54 AM	Main Vac valve opened
2/8/2011	11:59:54 AM	Bypass valve opened
2/8/2011	11:59:54 AM	Helium MFC set to  0.000000
2/8/2011	11:59:54 AM	H2 MFC set to  0.000000
2/8/2011	11:59:54 AM	BCl3 MFC set to  0.000000
2/8/2011	11:59:54 AM	PHl3 MFC set to  0.000000
2/8/2011	11:59:54 AM	SiCl4 MFC set to  0.000000
2/8/2011	11:59:54 AM	Bypass solenoid MFC set to  0.000000
2/8/2011	11:59:54 AM	Tube furnace set to 0
2/8/2011	11:59:55 AM	Run finished at 11:59 AM
2/8/2011	11:59:55 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/8/2011	3:08:51 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
2/8/2011	3:08:51 PM	Recipe started at 3:08 PM
2/8/2011	3:08:51 PM	Helium valve closed
2/8/2011	3:08:51 PM	H2 valve closed
2/8/2011	3:08:51 PM	BCl3 valve closed
2/8/2011	3:08:51 PM	PH3 valve closed
2/8/2011	3:08:51 PM	SiCl4 pre valve closed
2/8/2011	3:08:51 PM	SiCl4 post valve closed
2/8/2011	3:08:51 PM	Main Vac valve closed
2/8/2011	3:08:51 PM	Bypass valve closed
2/8/2011	3:08:51 PM	Bubbler valve closed
2/8/2011	3:08:51 PM	Helium MFC set to  0.000000
2/8/2011	3:08:51 PM	H2 MFC set to  0.000000
2/8/2011	3:08:51 PM	BCl3 MFC set to  0.000000
2/8/2011	3:08:51 PM	PHl3 MFC set to  0.000000
2/8/2011	3:08:51 PM	SiCl4 MFC set to  0.000000
2/8/2011	3:08:51 PM	Bypass solenoid MFC set to  0.000000
2/8/2011	3:08:51 PM	Tube furnace set to 0
2/8/2011	3:08:52 PM	Run finished at 3:08 PM
2/8/2011	3:08:52 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
2/8/2011	3:09:02 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/8/2011	3:09:02 PM	Recipe started at 3:09 PM
2/8/2011	3:09:02 PM	Helium valve closed
2/8/2011	3:09:02 PM	H2 valve closed
2/8/2011	3:09:02 PM	BCl3 valve closed
2/8/2011	3:09:02 PM	PH3 valve closed
2/8/2011	3:09:02 PM	SiCl4 pre valve closed
2/8/2011	3:09:02 PM	SiCl4 post valve closed
2/8/2011	3:09:02 PM	Main Vac valve closed
2/8/2011	3:09:02 PM	Bubbler valve closed
2/8/2011	3:09:02 PM	Bypass valve opened
2/8/2011	3:09:02 PM	Helium MFC set to  0.000000
2/8/2011	3:09:02 PM	H2 MFC set to  0.000000
2/8/2011	3:09:02 PM	BCl3 MFC set to  0.000000
2/8/2011	3:09:02 PM	PHl3 MFC set to  0.000000
2/8/2011	3:09:02 PM	SiCl4 MFC set to  0.000000
2/8/2011	3:09:02 PM	Bypass solenoid MFC set to  0.000000
2/8/2011	3:09:02 PM	Tube furnace set to 0
2/8/2011	3:09:03 PM	Helium valve closed
2/8/2011	3:09:03 PM	H2 valve closed
2/8/2011	3:09:03 PM	BCl3 valve closed
2/8/2011	3:09:03 PM	PH3 valve closed
2/8/2011	3:09:03 PM	SiCl4 pre valve closed
2/8/2011	3:09:03 PM	SiCl4 post valve closed
2/8/2011	3:09:03 PM	Bubbler valve closed
2/8/2011	3:09:03 PM	Main Vac valve opened
2/8/2011	3:09:03 PM	Bypass valve opened
2/8/2011	3:09:03 PM	Helium MFC set to  0.000000
2/8/2011	3:09:03 PM	H2 MFC set to  0.000000
2/8/2011	3:09:03 PM	BCl3 MFC set to  0.000000
2/8/2011	3:09:03 PM	PHl3 MFC set to  0.000000
2/8/2011	3:09:03 PM	SiCl4 MFC set to  0.000000
2/8/2011	3:09:03 PM	Bypass solenoid MFC set to  0.000000
2/8/2011	3:09:03 PM	Tube furnace set to 0
2/8/2011	3:09:03 PM	Run finished at 3:09 PM
2/8/2011	3:09:03 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/8/2011	3:09:22 PM	Recipe started at 3:09 PM
2/8/2011	3:09:22 PM	Helium valve closed
2/8/2011	3:09:22 PM	BCl3 valve closed
2/8/2011	3:09:22 PM	PH3 valve closed
2/8/2011	3:09:22 PM	SiCl4 pre valve closed
2/8/2011	3:09:22 PM	SiCl4 post valve closed
2/8/2011	3:09:22 PM	Main Vac valve closed
2/8/2011	3:09:22 PM	Bypass valve closed
2/8/2011	3:09:22 PM	Bubbler valve closed
2/8/2011	3:09:22 PM	H2 valve opened
2/8/2011	3:09:22 PM	Helium MFC set to  0.000000
2/8/2011	3:09:22 PM	H2 MFC set to  500.000000
2/8/2011	3:09:22 PM	BCl3 MFC set to  0.000000
2/8/2011	3:09:22 PM	PHl3 MFC set to  0.000000
2/8/2011	3:09:22 PM	SiCl4 MFC set to  0.000000
2/8/2011	3:09:22 PM	Bypass solenoid MFC set to  0.000000
2/8/2011	3:09:23 PM	Tube furnace set to 0
2/8/2011	3:10:46 PM	Helium valve closed
2/8/2011	3:10:46 PM	BCl3 valve closed
2/8/2011	3:10:46 PM	PH3 valve closed
2/8/2011	3:10:46 PM	SiCl4 pre valve closed
2/8/2011	3:10:46 PM	SiCl4 post valve closed
2/8/2011	3:10:46 PM	Main Vac valve closed
2/8/2011	3:10:46 PM	Bypass valve closed
2/8/2011	3:10:46 PM	H2 valve opened
2/8/2011	3:10:46 PM	Bubbler valve opened
2/8/2011	3:10:46 PM	Helium MFC set to  0.000000
2/8/2011	3:10:46 PM	H2 MFC set to  500.000000
2/8/2011	3:10:46 PM	BCl3 MFC set to  0.000000
2/8/2011	3:10:46 PM	PHl3 MFC set to  0.000000
2/8/2011	3:10:46 PM	SiCl4 MFC set to  0.000000
2/8/2011	3:10:46 PM	Bypass solenoid MFC set to  0.000000
2/8/2011	3:10:46 PM	Tube furnace set to 1000
2/8/2011	3:30:46 PM	Helium valve closed
2/8/2011	3:30:46 PM	BCl3 valve closed
2/8/2011	3:30:46 PM	PH3 valve closed
2/8/2011	3:30:46 PM	Main Vac valve closed
2/8/2011	3:30:46 PM	Bypass valve closed
2/8/2011	3:30:46 PM	H2 valve opened
2/8/2011	3:30:46 PM	SiCl4 pre valve opened
2/8/2011	3:30:46 PM	SiCl4 post valve opened
2/8/2011	3:30:46 PM	Bubbler valve opened
2/8/2011	3:30:46 PM	Helium MFC set to  0.000000
2/8/2011	3:30:46 PM	H2 MFC set to  400.000000
2/8/2011	3:30:46 PM	BCl3 MFC set to  0.000000
2/8/2011	3:30:46 PM	PHl3 MFC set to  0.000000
2/8/2011	3:30:46 PM	SiCl4 MFC set to  40.000000
2/8/2011	3:30:46 PM	Bypass solenoid MFC set to  0.000000
2/8/2011	3:30:46 PM	Tube furnace set to 1000
2/8/2011	3:45:46 PM	H2 valve closed
2/8/2011	3:45:46 PM	BCl3 valve closed
2/8/2011	3:45:46 PM	PH3 valve closed
2/8/2011	3:45:46 PM	SiCl4 pre valve closed
2/8/2011	3:45:46 PM	SiCl4 post valve closed
2/8/2011	3:45:46 PM	Main Vac valve closed
2/8/2011	3:45:46 PM	Bypass valve closed
2/8/2011	3:45:46 PM	Helium valve opened
2/8/2011	3:45:46 PM	Bubbler valve opened
2/8/2011	3:45:46 PM	Helium MFC set to  500.000000
2/8/2011	3:45:46 PM	H2 MFC set to  0.000000
2/8/2011	3:45:46 PM	BCl3 MFC set to  0.000000
2/8/2011	3:45:46 PM	PHl3 MFC set to  0.000000
2/8/2011	3:45:46 PM	SiCl4 MFC set to  0.000000
2/8/2011	3:45:46 PM	Bypass solenoid MFC set to  0.000000
2/8/2011	3:45:46 PM	Tube furnace set to 0
2/8/2011	3:57:22 PM	Helium valve closed
2/8/2011	3:57:22 PM	H2 valve closed
2/8/2011	3:57:22 PM	BCl3 valve closed
2/8/2011	3:57:22 PM	PH3 valve closed
2/8/2011	3:57:22 PM	SiCl4 pre valve closed
2/8/2011	3:57:22 PM	SiCl4 post valve closed
2/8/2011	3:57:22 PM	Main Vac valve closed
2/8/2011	3:57:22 PM	Bypass valve closed
2/8/2011	3:57:22 PM	Bubbler valve closed
2/8/2011	3:57:22 PM	Helium MFC set to  0.000000
2/8/2011	3:57:22 PM	H2 MFC set to  0.000000
2/8/2011	3:57:22 PM	BCl3 MFC set to  0.000000
2/8/2011	3:57:22 PM	PHl3 MFC set to  0.000000
2/8/2011	3:57:22 PM	SiCl4 MFC set to  0.000000
2/8/2011	3:57:22 PM	Bypass solenoid MFC set to  0.000000
2/8/2011	3:57:22 PM	Tube furnace set to 0
2/8/2011	3:57:23 PM	Run finished at 3:57 PM
2/8/2011	4:12:19 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/8/2011	4:12:19 PM	Recipe started at 4:12 PM
2/8/2011	4:12:19 PM	Helium valve closed
2/8/2011	4:12:19 PM	H2 valve closed
2/8/2011	4:12:19 PM	BCl3 valve closed
2/8/2011	4:12:19 PM	PH3 valve closed
2/8/2011	4:12:19 PM	SiCl4 pre valve closed
2/8/2011	4:12:19 PM	SiCl4 post valve closed
2/8/2011	4:12:19 PM	Main Vac valve closed
2/8/2011	4:12:19 PM	Bubbler valve closed
2/8/2011	4:12:19 PM	Bypass valve opened
2/8/2011	4:12:19 PM	Helium MFC set to  0.000000
2/8/2011	4:12:19 PM	H2 MFC set to  0.000000
2/8/2011	4:12:19 PM	BCl3 MFC set to  0.000000
2/8/2011	4:12:19 PM	PHl3 MFC set to  0.000000
2/8/2011	4:12:19 PM	SiCl4 MFC set to  0.000000
2/8/2011	4:12:19 PM	Bypass solenoid MFC set to  0.000000
2/8/2011	4:12:20 PM	Tube furnace set to 0
2/8/2011	4:12:53 PM	Helium valve closed
2/8/2011	4:12:53 PM	H2 valve closed
2/8/2011	4:12:53 PM	BCl3 valve closed
2/8/2011	4:12:53 PM	PH3 valve closed
2/8/2011	4:12:53 PM	SiCl4 pre valve closed
2/8/2011	4:12:53 PM	SiCl4 post valve closed
2/8/2011	4:12:53 PM	Bubbler valve closed
2/8/2011	4:12:53 PM	Main Vac valve opened
2/8/2011	4:12:53 PM	Bypass valve opened
2/8/2011	4:12:53 PM	Helium MFC set to  0.000000
2/8/2011	4:12:53 PM	H2 MFC set to  0.000000
2/8/2011	4:12:53 PM	BCl3 MFC set to  0.000000
2/8/2011	4:12:53 PM	PHl3 MFC set to  0.000000
2/8/2011	4:12:53 PM	SiCl4 MFC set to  0.000000
2/8/2011	4:12:53 PM	Bypass solenoid MFC set to  0.000000
2/8/2011	4:12:53 PM	Tube furnace set to 0
2/8/2011	4:12:53 PM	Run finished at 4:12 PM
2/8/2011	4:12:53 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/8/2011	4:17:01 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
2/8/2011	4:17:12 PM	Recipe started at 4:17 PM
2/8/2011	4:17:12 PM	Helium valve closed
2/8/2011	4:17:12 PM	H2 valve closed
2/8/2011	4:17:12 PM	BCl3 valve closed
2/8/2011	4:17:12 PM	PH3 valve closed
2/8/2011	4:17:13 PM	SiCl4 pre valve closed
2/8/2011	4:17:13 PM	SiCl4 post valve closed
2/8/2011	4:17:13 PM	Main Vac valve closed
2/8/2011	4:17:13 PM	Bubbler valve closed
2/8/2011	4:17:13 PM	Bypass valve opened
2/8/2011	4:17:13 PM	Helium MFC set to  0.000000
2/8/2011	4:17:13 PM	H2 MFC set to  0.000000
2/8/2011	4:17:13 PM	BCl3 MFC set to  0.000000
2/8/2011	4:17:13 PM	PHl3 MFC set to  0.000000
2/8/2011	4:17:13 PM	SiCl4 MFC set to  0.000000
2/8/2011	4:17:13 PM	Bypass solenoid MFC set to  0.000000
2/8/2011	4:17:13 PM	Tube furnace set to 0
2/8/2011	4:17:13 PM	Helium valve closed
2/8/2011	4:17:13 PM	H2 valve closed
2/8/2011	4:17:13 PM	BCl3 valve closed
2/8/2011	4:17:13 PM	PH3 valve closed
2/8/2011	4:17:13 PM	SiCl4 pre valve closed
2/8/2011	4:17:13 PM	SiCl4 post valve closed
2/8/2011	4:17:13 PM	Bubbler valve closed
2/8/2011	4:17:13 PM	Main Vac valve opened
2/8/2011	4:17:13 PM	Bypass valve opened
2/8/2011	4:17:13 PM	Helium MFC set to  0.000000
2/8/2011	4:17:13 PM	H2 MFC set to  0.000000
2/8/2011	4:17:13 PM	BCl3 MFC set to  0.000000
2/8/2011	4:17:13 PM	PHl3 MFC set to  0.000000
2/8/2011	4:17:13 PM	SiCl4 MFC set to  0.000000
2/8/2011	4:17:13 PM	Bypass solenoid MFC set to  0.000000
2/8/2011	4:17:13 PM	Tube furnace set to 0
2/8/2011	4:18:13 PM	H2 valve closed
2/8/2011	4:18:13 PM	BCl3 valve closed
2/8/2011	4:18:13 PM	PH3 valve closed
2/8/2011	4:18:13 PM	SiCl4 pre valve closed
2/8/2011	4:18:13 PM	SiCl4 post valve closed
2/8/2011	4:18:13 PM	Bubbler valve closed
2/8/2011	4:18:13 PM	Helium valve opened
2/8/2011	4:18:13 PM	Main Vac valve opened
2/8/2011	4:18:13 PM	Bypass valve opened
2/8/2011	4:18:13 PM	Helium MFC set to  100.000000
2/8/2011	4:18:13 PM	H2 MFC set to  0.000000
2/8/2011	4:18:13 PM	BCl3 MFC set to  0.000000
2/8/2011	4:18:13 PM	PHl3 MFC set to  0.000000
2/8/2011	4:18:13 PM	SiCl4 MFC set to  0.000000
2/8/2011	4:18:13 PM	Bypass solenoid MFC set to  0.000000
2/8/2011	4:18:13 PM	Tube furnace set to 0
2/8/2011	4:19:13 PM	Helium valve closed
2/8/2011	4:19:13 PM	H2 valve closed
2/8/2011	4:19:13 PM	BCl3 valve closed
2/8/2011	4:19:13 PM	PH3 valve closed
2/8/2011	4:19:13 PM	SiCl4 pre valve closed
2/8/2011	4:19:13 PM	SiCl4 post valve closed
2/8/2011	4:19:13 PM	Bubbler valve closed
2/8/2011	4:19:13 PM	Main Vac valve opened
2/8/2011	4:19:13 PM	Bypass valve opened
2/8/2011	4:19:13 PM	Helium MFC set to  0.000000
2/8/2011	4:19:13 PM	H2 MFC set to  0.000000
2/8/2011	4:19:13 PM	BCl3 MFC set to  0.000000
2/8/2011	4:19:13 PM	PHl3 MFC set to  0.000000
2/8/2011	4:19:13 PM	SiCl4 MFC set to  0.000000
2/8/2011	4:19:13 PM	Bypass solenoid MFC set to  0.000000
2/8/2011	4:19:14 PM	Tube furnace set to 0
2/8/2011	4:20:14 PM	H2 valve closed
2/8/2011	4:20:14 PM	BCl3 valve closed
2/8/2011	4:20:14 PM	PH3 valve closed
2/8/2011	4:20:14 PM	SiCl4 pre valve closed
2/8/2011	4:20:14 PM	SiCl4 post valve closed
2/8/2011	4:20:14 PM	Bubbler valve closed
2/8/2011	4:20:14 PM	Helium valve opened
2/8/2011	4:20:14 PM	Main Vac valve opened
2/8/2011	4:20:14 PM	Bypass valve opened
2/8/2011	4:20:14 PM	Helium MFC set to  100.000000
2/8/2011	4:20:14 PM	H2 MFC set to  0.000000
2/8/2011	4:20:14 PM	BCl3 MFC set to  0.000000
2/8/2011	4:20:14 PM	PHl3 MFC set to  0.000000
2/8/2011	4:20:14 PM	SiCl4 MFC set to  0.000000
2/8/2011	4:20:14 PM	Bypass solenoid MFC set to  0.000000
2/8/2011	4:20:14 PM	Tube furnace set to 0
2/8/2011	4:21:14 PM	Helium valve closed
2/8/2011	4:21:14 PM	H2 valve closed
2/8/2011	4:21:14 PM	BCl3 valve closed
2/8/2011	4:21:14 PM	PH3 valve closed
2/8/2011	4:21:14 PM	SiCl4 pre valve closed
2/8/2011	4:21:14 PM	SiCl4 post valve closed
2/8/2011	4:21:14 PM	Bubbler valve closed
2/8/2011	4:21:14 PM	Main Vac valve opened
2/8/2011	4:21:14 PM	Bypass valve opened
2/8/2011	4:21:14 PM	Helium MFC set to  0.000000
2/8/2011	4:21:14 PM	H2 MFC set to  0.000000
2/8/2011	4:21:14 PM	BCl3 MFC set to  0.000000
2/8/2011	4:21:14 PM	PHl3 MFC set to  0.000000
2/8/2011	4:21:14 PM	SiCl4 MFC set to  0.000000
2/8/2011	4:21:14 PM	Bypass solenoid MFC set to  0.000000
2/8/2011	4:21:14 PM	Tube furnace set to 0
2/8/2011	4:22:14 PM	H2 valve closed
2/8/2011	4:22:14 PM	BCl3 valve closed
2/8/2011	4:22:14 PM	PH3 valve closed
2/8/2011	4:22:14 PM	SiCl4 pre valve closed
2/8/2011	4:22:14 PM	SiCl4 post valve closed
2/8/2011	4:22:14 PM	Bubbler valve closed
2/8/2011	4:22:14 PM	Helium valve opened
2/8/2011	4:22:14 PM	Main Vac valve opened
2/8/2011	4:22:14 PM	Bypass valve opened
2/8/2011	4:22:14 PM	Helium MFC set to  100.000000
2/8/2011	4:22:14 PM	H2 MFC set to  0.000000
2/8/2011	4:22:14 PM	BCl3 MFC set to  0.000000
2/8/2011	4:22:14 PM	PHl3 MFC set to  0.000000
2/8/2011	4:22:14 PM	SiCl4 MFC set to  0.000000
2/8/2011	4:22:14 PM	Bypass solenoid MFC set to  0.000000
2/8/2011	4:22:14 PM	Tube furnace set to 0
2/8/2011	4:23:14 PM	Helium valve closed
2/8/2011	4:23:14 PM	H2 valve closed
2/8/2011	4:23:14 PM	BCl3 valve closed
2/8/2011	4:23:14 PM	PH3 valve closed
2/8/2011	4:23:14 PM	SiCl4 pre valve closed
2/8/2011	4:23:14 PM	SiCl4 post valve closed
2/8/2011	4:23:14 PM	Bubbler valve closed
2/8/2011	4:23:14 PM	Main Vac valve opened
2/8/2011	4:23:14 PM	Bypass valve opened
2/8/2011	4:23:14 PM	Helium MFC set to  0.000000
2/8/2011	4:23:14 PM	H2 MFC set to  0.000000
2/8/2011	4:23:14 PM	BCl3 MFC set to  0.000000
2/8/2011	4:23:14 PM	PHl3 MFC set to  0.000000
2/8/2011	4:23:14 PM	SiCl4 MFC set to  0.000000
2/8/2011	4:23:14 PM	Bypass solenoid MFC set to  0.000000
2/8/2011	4:23:14 PM	Tube furnace set to 0
2/8/2011	4:24:14 PM	H2 valve closed
2/8/2011	4:24:14 PM	BCl3 valve closed
2/8/2011	4:24:14 PM	PH3 valve closed
2/8/2011	4:24:14 PM	SiCl4 pre valve closed
2/8/2011	4:24:14 PM	SiCl4 post valve closed
2/8/2011	4:24:14 PM	Bubbler valve closed
2/8/2011	4:24:14 PM	Helium valve opened
2/8/2011	4:24:14 PM	Main Vac valve opened
2/8/2011	4:24:14 PM	Bypass valve opened
2/8/2011	4:24:14 PM	Helium MFC set to  100.000000
2/8/2011	4:24:14 PM	H2 MFC set to  0.000000
2/8/2011	4:24:14 PM	BCl3 MFC set to  0.000000
2/8/2011	4:24:14 PM	PHl3 MFC set to  0.000000
2/8/2011	4:24:14 PM	SiCl4 MFC set to  0.000000
2/8/2011	4:24:14 PM	Bypass solenoid MFC set to  0.000000
2/8/2011	4:24:14 PM	Tube furnace set to 0
2/8/2011	4:25:15 PM	Helium valve closed
2/8/2011	4:25:15 PM	H2 valve closed
2/8/2011	4:25:15 PM	BCl3 valve closed
2/8/2011	4:25:15 PM	PH3 valve closed
2/8/2011	4:25:15 PM	SiCl4 pre valve closed
2/8/2011	4:25:15 PM	SiCl4 post valve closed
2/8/2011	4:25:15 PM	Bubbler valve closed
2/8/2011	4:25:15 PM	Main Vac valve opened
2/8/2011	4:25:15 PM	Bypass valve opened
2/8/2011	4:25:15 PM	Helium MFC set to  0.000000
2/8/2011	4:25:15 PM	H2 MFC set to  0.000000
2/8/2011	4:25:15 PM	BCl3 MFC set to  0.000000
2/8/2011	4:25:15 PM	PHl3 MFC set to  0.000000
2/8/2011	4:25:15 PM	SiCl4 MFC set to  0.000000
2/8/2011	4:25:15 PM	Bypass solenoid MFC set to  0.000000
2/8/2011	4:25:15 PM	Tube furnace set to 0
2/8/2011	4:26:15 PM	H2 valve closed
2/8/2011	4:26:15 PM	BCl3 valve closed
2/8/2011	4:26:15 PM	PH3 valve closed
2/8/2011	4:26:15 PM	SiCl4 pre valve closed
2/8/2011	4:26:15 PM	SiCl4 post valve closed
2/8/2011	4:26:15 PM	Bubbler valve closed
2/8/2011	4:26:15 PM	Helium valve opened
2/8/2011	4:26:15 PM	Main Vac valve opened
2/8/2011	4:26:15 PM	Bypass valve opened
2/8/2011	4:26:15 PM	Helium MFC set to  100.000000
2/8/2011	4:26:15 PM	H2 MFC set to  0.000000
2/8/2011	4:26:15 PM	BCl3 MFC set to  0.000000
2/8/2011	4:26:15 PM	PHl3 MFC set to  0.000000
2/8/2011	4:26:15 PM	SiCl4 MFC set to  0.000000
2/8/2011	4:26:15 PM	Bypass solenoid MFC set to  0.000000
2/8/2011	4:26:15 PM	Tube furnace set to 0
2/8/2011	4:27:15 PM	Helium valve closed
2/8/2011	4:27:15 PM	H2 valve closed
2/8/2011	4:27:15 PM	BCl3 valve closed
2/8/2011	4:27:15 PM	PH3 valve closed
2/8/2011	4:27:15 PM	SiCl4 pre valve closed
2/8/2011	4:27:15 PM	SiCl4 post valve closed
2/8/2011	4:27:15 PM	Bubbler valve closed
2/8/2011	4:27:15 PM	Main Vac valve opened
2/8/2011	4:27:15 PM	Bypass valve opened
2/8/2011	4:27:15 PM	Helium MFC set to  0.000000
2/8/2011	4:27:15 PM	H2 MFC set to  0.000000
2/8/2011	4:27:15 PM	BCl3 MFC set to  0.000000
2/8/2011	4:27:15 PM	PHl3 MFC set to  0.000000
2/8/2011	4:27:15 PM	SiCl4 MFC set to  0.000000
2/8/2011	4:27:15 PM	Bypass solenoid MFC set to  0.000000
2/8/2011	4:27:15 PM	Tube furnace set to 0
2/8/2011	4:28:15 PM	H2 valve closed
2/8/2011	4:28:15 PM	BCl3 valve closed
2/8/2011	4:28:15 PM	PH3 valve closed
2/8/2011	4:28:15 PM	SiCl4 pre valve closed
2/8/2011	4:28:15 PM	SiCl4 post valve closed
2/8/2011	4:28:15 PM	Bubbler valve closed
2/8/2011	4:28:15 PM	Helium valve opened
2/8/2011	4:28:15 PM	Main Vac valve opened
2/8/2011	4:28:15 PM	Bypass valve opened
2/8/2011	4:28:15 PM	Helium MFC set to  100.000000
2/8/2011	4:28:15 PM	H2 MFC set to  0.000000
2/8/2011	4:28:15 PM	BCl3 MFC set to  0.000000
2/8/2011	4:28:15 PM	PHl3 MFC set to  0.000000
2/8/2011	4:28:15 PM	SiCl4 MFC set to  0.000000
2/8/2011	4:28:15 PM	Bypass solenoid MFC set to  0.000000
2/8/2011	4:28:15 PM	Tube furnace set to 0
2/8/2011	4:29:15 PM	Helium valve closed
2/8/2011	4:29:15 PM	H2 valve closed
2/8/2011	4:29:15 PM	BCl3 valve closed
2/8/2011	4:29:15 PM	PH3 valve closed
2/8/2011	4:29:15 PM	SiCl4 pre valve closed
2/8/2011	4:29:15 PM	SiCl4 post valve closed
2/8/2011	4:29:15 PM	Bubbler valve closed
2/8/2011	4:29:15 PM	Main Vac valve opened
2/8/2011	4:29:15 PM	Bypass valve opened
2/8/2011	4:29:15 PM	Helium MFC set to  0.000000
2/8/2011	4:29:15 PM	H2 MFC set to  0.000000
2/8/2011	4:29:15 PM	BCl3 MFC set to  0.000000
2/8/2011	4:29:15 PM	PHl3 MFC set to  0.000000
2/8/2011	4:29:15 PM	SiCl4 MFC set to  0.000000
2/8/2011	4:29:15 PM	Bypass solenoid MFC set to  0.000000
2/8/2011	4:29:15 PM	Tube furnace set to 0
2/8/2011	4:30:15 PM	H2 valve closed
2/8/2011	4:30:15 PM	BCl3 valve closed
2/8/2011	4:30:15 PM	PH3 valve closed
2/8/2011	4:30:16 PM	SiCl4 pre valve closed
2/8/2011	4:30:16 PM	SiCl4 post valve closed
2/8/2011	4:30:16 PM	Bubbler valve closed
2/8/2011	4:30:16 PM	Helium valve opened
2/8/2011	4:30:16 PM	Main Vac valve opened
2/8/2011	4:30:16 PM	Bypass valve opened
2/8/2011	4:30:16 PM	Helium MFC set to  100.000000
2/8/2011	4:30:16 PM	H2 MFC set to  0.000000
2/8/2011	4:30:16 PM	BCl3 MFC set to  0.000000
2/8/2011	4:30:16 PM	PHl3 MFC set to  0.000000
2/8/2011	4:30:16 PM	SiCl4 MFC set to  0.000000
2/8/2011	4:30:16 PM	Bypass solenoid MFC set to  0.000000
2/8/2011	4:30:16 PM	Tube furnace set to 0
2/8/2011	4:31:16 PM	Helium valve closed
2/8/2011	4:31:16 PM	H2 valve closed
2/8/2011	4:31:16 PM	BCl3 valve closed
2/8/2011	4:31:16 PM	PH3 valve closed
2/8/2011	4:31:16 PM	SiCl4 pre valve closed
2/8/2011	4:31:16 PM	SiCl4 post valve closed
2/8/2011	4:31:16 PM	Bubbler valve closed
2/8/2011	4:31:16 PM	Main Vac valve opened
2/8/2011	4:31:16 PM	Bypass valve opened
2/8/2011	4:31:16 PM	Helium MFC set to  0.000000
2/8/2011	4:31:16 PM	H2 MFC set to  0.000000
2/8/2011	4:31:16 PM	BCl3 MFC set to  0.000000
2/8/2011	4:31:16 PM	PHl3 MFC set to  0.000000
2/8/2011	4:31:16 PM	SiCl4 MFC set to  0.000000
2/8/2011	4:31:16 PM	Bypass solenoid MFC set to  0.000000
2/8/2011	4:31:16 PM	Tube furnace set to 0
2/8/2011	4:32:16 PM	H2 valve closed
2/8/2011	4:32:16 PM	BCl3 valve closed
2/8/2011	4:32:16 PM	PH3 valve closed
2/8/2011	4:32:16 PM	SiCl4 pre valve closed
2/8/2011	4:32:16 PM	SiCl4 post valve closed
2/8/2011	4:32:16 PM	Bubbler valve closed
2/8/2011	4:32:16 PM	Helium valve opened
2/8/2011	4:32:16 PM	Main Vac valve opened
2/8/2011	4:32:16 PM	Bypass valve opened
2/8/2011	4:32:16 PM	Helium MFC set to  100.000000
2/8/2011	4:32:16 PM	H2 MFC set to  0.000000
2/8/2011	4:32:16 PM	BCl3 MFC set to  0.000000
2/8/2011	4:32:16 PM	PHl3 MFC set to  0.000000
2/8/2011	4:32:16 PM	SiCl4 MFC set to  0.000000
2/8/2011	4:32:16 PM	Bypass solenoid MFC set to  0.000000
2/8/2011	4:32:16 PM	Tube furnace set to 0
2/8/2011	4:33:16 PM	Helium valve closed
2/8/2011	4:33:16 PM	H2 valve closed
2/8/2011	4:33:16 PM	BCl3 valve closed
2/8/2011	4:33:16 PM	PH3 valve closed
2/8/2011	4:33:16 PM	SiCl4 pre valve closed
2/8/2011	4:33:16 PM	SiCl4 post valve closed
2/8/2011	4:33:16 PM	Bubbler valve closed
2/8/2011	4:33:16 PM	Main Vac valve opened
2/8/2011	4:33:16 PM	Bypass valve opened
2/8/2011	4:33:16 PM	Helium MFC set to  0.000000
2/8/2011	4:33:16 PM	H2 MFC set to  0.000000
2/8/2011	4:33:16 PM	BCl3 MFC set to  0.000000
2/8/2011	4:33:16 PM	PHl3 MFC set to  0.000000
2/8/2011	4:33:16 PM	SiCl4 MFC set to  0.000000
2/8/2011	4:33:16 PM	Bypass solenoid MFC set to  0.000000
2/8/2011	4:33:16 PM	Tube furnace set to 0
2/8/2011	4:34:16 PM	H2 valve closed
2/8/2011	4:34:16 PM	BCl3 valve closed
2/8/2011	4:34:16 PM	PH3 valve closed
2/8/2011	4:34:16 PM	SiCl4 pre valve closed
2/8/2011	4:34:16 PM	SiCl4 post valve closed
2/8/2011	4:34:16 PM	Bubbler valve closed
2/8/2011	4:34:16 PM	Helium valve opened
2/8/2011	4:34:16 PM	Main Vac valve opened
2/8/2011	4:34:16 PM	Bypass valve opened
2/8/2011	4:34:16 PM	Helium MFC set to  100.000000
2/8/2011	4:34:16 PM	H2 MFC set to  0.000000
2/8/2011	4:34:16 PM	BCl3 MFC set to  0.000000
2/8/2011	4:34:16 PM	PHl3 MFC set to  0.000000
2/8/2011	4:34:16 PM	SiCl4 MFC set to  0.000000
2/8/2011	4:34:16 PM	Bypass solenoid MFC set to  0.000000
2/8/2011	4:34:16 PM	Tube furnace set to 0
2/8/2011	4:35:16 PM	Helium valve closed
2/8/2011	4:35:16 PM	H2 valve closed
2/8/2011	4:35:16 PM	BCl3 valve closed
2/8/2011	4:35:16 PM	PH3 valve closed
2/8/2011	4:35:16 PM	SiCl4 pre valve closed
2/8/2011	4:35:16 PM	SiCl4 post valve closed
2/8/2011	4:35:17 PM	Bubbler valve closed
2/8/2011	4:35:17 PM	Main Vac valve opened
2/8/2011	4:35:17 PM	Bypass valve opened
2/8/2011	4:35:17 PM	Helium MFC set to  0.000000
2/8/2011	4:35:17 PM	H2 MFC set to  0.000000
2/8/2011	4:35:17 PM	BCl3 MFC set to  0.000000
2/8/2011	4:35:17 PM	PHl3 MFC set to  0.000000
2/8/2011	4:35:17 PM	SiCl4 MFC set to  0.000000
2/8/2011	4:35:17 PM	Bypass solenoid MFC set to  0.000000
2/8/2011	4:35:17 PM	Tube furnace set to 0
2/8/2011	4:36:17 PM	H2 valve closed
2/8/2011	4:36:17 PM	BCl3 valve closed
2/8/2011	4:36:17 PM	PH3 valve closed
2/8/2011	4:36:17 PM	SiCl4 pre valve closed
2/8/2011	4:36:17 PM	SiCl4 post valve closed
2/8/2011	4:36:17 PM	Bubbler valve closed
2/8/2011	4:36:17 PM	Helium valve opened
2/8/2011	4:36:17 PM	Main Vac valve opened
2/8/2011	4:36:17 PM	Bypass valve opened
2/8/2011	4:36:17 PM	Helium MFC set to  100.000000
2/8/2011	4:36:17 PM	H2 MFC set to  0.000000
2/8/2011	4:36:17 PM	BCl3 MFC set to  0.000000
2/8/2011	4:36:17 PM	PHl3 MFC set to  0.000000
2/8/2011	4:36:17 PM	SiCl4 MFC set to  0.000000
2/8/2011	4:36:17 PM	Bypass solenoid MFC set to  0.000000
2/8/2011	4:36:17 PM	Tube furnace set to 0
2/8/2011	4:37:17 PM	Helium valve closed
2/8/2011	4:37:17 PM	H2 valve closed
2/8/2011	4:37:17 PM	BCl3 valve closed
2/8/2011	4:37:17 PM	PH3 valve closed
2/8/2011	4:37:17 PM	SiCl4 pre valve closed
2/8/2011	4:37:17 PM	SiCl4 post valve closed
2/8/2011	4:37:17 PM	Bubbler valve closed
2/8/2011	4:37:17 PM	Main Vac valve opened
2/8/2011	4:37:17 PM	Bypass valve opened
2/8/2011	4:37:17 PM	Helium MFC set to  0.000000
2/8/2011	4:37:17 PM	H2 MFC set to  0.000000
2/8/2011	4:37:17 PM	BCl3 MFC set to  0.000000
2/8/2011	4:37:17 PM	PHl3 MFC set to  0.000000
2/8/2011	4:37:17 PM	SiCl4 MFC set to  0.000000
2/8/2011	4:37:17 PM	Bypass solenoid MFC set to  0.000000
2/8/2011	4:37:17 PM	Tube furnace set to 0
2/8/2011	4:37:18 PM	Run finished at 4:37 PM
2/8/2011	4:37:18 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
2/8/2011	4:58:59 PM	Recipe started at 4:58 PM
2/8/2011	4:58:59 PM	Helium valve closed
2/8/2011	4:58:59 PM	BCl3 valve closed
2/8/2011	4:58:59 PM	PH3 valve closed
2/8/2011	4:58:59 PM	SiCl4 pre valve closed
2/8/2011	4:58:59 PM	SiCl4 post valve closed
2/8/2011	4:58:59 PM	Main Vac valve closed
2/8/2011	4:58:59 PM	Bypass valve closed
2/8/2011	4:58:59 PM	Bubbler valve closed
2/8/2011	4:58:59 PM	H2 valve opened
2/8/2011	4:58:59 PM	Helium MFC set to  0.000000
2/8/2011	4:58:59 PM	H2 MFC set to  500.000000
2/8/2011	4:58:59 PM	BCl3 MFC set to  0.000000
2/8/2011	4:58:59 PM	PHl3 MFC set to  0.000000
2/8/2011	4:58:59 PM	SiCl4 MFC set to  0.000000
2/8/2011	4:58:59 PM	Bypass solenoid MFC set to  0.000000
2/8/2011	4:59:00 PM	Tube furnace set to 0
2/8/2011	5:00:19 PM	Helium valve closed
2/8/2011	5:00:19 PM	BCl3 valve closed
2/8/2011	5:00:19 PM	PH3 valve closed
2/8/2011	5:00:19 PM	SiCl4 pre valve closed
2/8/2011	5:00:19 PM	SiCl4 post valve closed
2/8/2011	5:00:19 PM	Main Vac valve closed
2/8/2011	5:00:19 PM	Bypass valve closed
2/8/2011	5:00:19 PM	H2 valve opened
2/8/2011	5:00:19 PM	Bubbler valve opened
2/8/2011	5:00:19 PM	Helium MFC set to  0.000000
2/8/2011	5:00:19 PM	H2 MFC set to  500.000000
2/8/2011	5:00:19 PM	BCl3 MFC set to  0.000000
2/8/2011	5:00:19 PM	PHl3 MFC set to  0.000000
2/8/2011	5:00:19 PM	SiCl4 MFC set to  0.000000
2/8/2011	5:00:19 PM	Bypass solenoid MFC set to  0.000000
2/8/2011	5:00:19 PM	Tube furnace set to 1000
2/8/2011	5:20:19 PM	Helium valve closed
2/8/2011	5:20:19 PM	PH3 valve closed
2/8/2011	5:20:19 PM	Main Vac valve closed
2/8/2011	5:20:19 PM	Bypass valve closed
2/8/2011	5:20:19 PM	H2 valve opened
2/8/2011	5:20:19 PM	BCl3 valve opened
2/8/2011	5:20:19 PM	SiCl4 pre valve opened
2/8/2011	5:20:19 PM	SiCl4 post valve opened
2/8/2011	5:20:19 PM	Bubbler valve opened
2/8/2011	5:20:19 PM	Helium MFC set to  0.000000
2/8/2011	5:20:19 PM	H2 MFC set to  500.000000
2/8/2011	5:20:19 PM	BCl3 MFC set to  3.000000
2/8/2011	5:20:19 PM	PHl3 MFC set to  0.000000
2/8/2011	5:20:19 PM	SiCl4 MFC set to  50.000000
2/8/2011	5:20:19 PM	Bypass solenoid MFC set to  0.000000
2/8/2011	5:20:19 PM	Tube furnace set to 1000
2/8/2011	7:20:19 PM	H2 valve closed
2/8/2011	7:20:19 PM	BCl3 valve closed
2/8/2011	7:20:19 PM	PH3 valve closed
2/8/2011	7:20:19 PM	SiCl4 pre valve closed
2/8/2011	7:20:19 PM	SiCl4 post valve closed
2/8/2011	7:20:19 PM	Main Vac valve closed
2/8/2011	7:20:19 PM	Bypass valve closed
2/8/2011	7:20:19 PM	Helium valve opened
2/8/2011	7:20:19 PM	Bubbler valve opened
2/8/2011	7:20:19 PM	Helium MFC set to  500.000000
2/8/2011	7:20:19 PM	H2 MFC set to  0.000000
2/8/2011	7:20:19 PM	BCl3 MFC set to  0.000000
2/8/2011	7:20:19 PM	PHl3 MFC set to  0.000000
2/8/2011	7:20:19 PM	SiCl4 MFC set to  0.000000
2/8/2011	7:20:19 PM	Bypass solenoid MFC set to  0.000000
2/8/2011	7:20:19 PM	Tube furnace set to 0
2/8/2011	7:27:51 PM	Helium valve closed
2/8/2011	7:27:51 PM	H2 valve closed
2/8/2011	7:27:51 PM	BCl3 valve closed
2/8/2011	7:27:51 PM	PH3 valve closed
2/8/2011	7:27:51 PM	SiCl4 pre valve closed
2/8/2011	7:27:51 PM	SiCl4 post valve closed
2/8/2011	7:27:51 PM	Main Vac valve closed
2/8/2011	7:27:51 PM	Bypass valve closed
2/8/2011	7:27:51 PM	Bubbler valve closed
2/8/2011	7:27:51 PM	Helium MFC set to  0.000000
2/8/2011	7:27:51 PM	H2 MFC set to  0.000000
2/8/2011	7:27:51 PM	BCl3 MFC set to  0.000000
2/8/2011	7:27:51 PM	PHl3 MFC set to  0.000000
2/8/2011	7:27:51 PM	SiCl4 MFC set to  0.000000
2/8/2011	7:27:51 PM	Bypass solenoid MFC set to  0.000000
2/8/2011	7:27:51 PM	Tube furnace set to 0
2/8/2011	7:27:51 PM	Run finished at 7:27 PM
2/8/2011	7:34:42 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/8/2011	7:34:42 PM	Recipe started at 7:34 PM
2/8/2011	7:34:42 PM	Helium valve closed
2/8/2011	7:34:42 PM	H2 valve closed
2/8/2011	7:34:42 PM	BCl3 valve closed
2/8/2011	7:34:42 PM	PH3 valve closed
2/8/2011	7:34:42 PM	SiCl4 pre valve closed
2/8/2011	7:34:42 PM	SiCl4 post valve closed
2/8/2011	7:34:42 PM	Main Vac valve closed
2/8/2011	7:34:42 PM	Bubbler valve closed
2/8/2011	7:34:42 PM	Bypass valve opened
2/8/2011	7:34:42 PM	Helium MFC set to  0.000000
2/8/2011	7:34:42 PM	H2 MFC set to  0.000000
2/8/2011	7:34:42 PM	BCl3 MFC set to  0.000000
2/8/2011	7:34:42 PM	PHl3 MFC set to  0.000000
2/8/2011	7:34:42 PM	SiCl4 MFC set to  0.000000
2/8/2011	7:34:42 PM	Bypass solenoid MFC set to  0.000000
2/8/2011	7:34:43 PM	Tube furnace set to 0
2/8/2011	7:35:15 PM	Helium valve closed
2/8/2011	7:35:15 PM	H2 valve closed
2/8/2011	7:35:15 PM	BCl3 valve closed
2/8/2011	7:35:15 PM	PH3 valve closed
2/8/2011	7:35:15 PM	SiCl4 pre valve closed
2/8/2011	7:35:15 PM	SiCl4 post valve closed
2/8/2011	7:35:15 PM	Bubbler valve closed
2/8/2011	7:35:15 PM	Main Vac valve opened
2/8/2011	7:35:15 PM	Bypass valve opened
2/8/2011	7:35:15 PM	Helium MFC set to  0.000000
2/8/2011	7:35:15 PM	H2 MFC set to  0.000000
2/8/2011	7:35:15 PM	BCl3 MFC set to  0.000000
2/8/2011	7:35:15 PM	PHl3 MFC set to  0.000000
2/8/2011	7:35:15 PM	SiCl4 MFC set to  0.000000
2/8/2011	7:35:15 PM	Bypass solenoid MFC set to  0.000000
2/8/2011	7:35:15 PM	Tube furnace set to 0
2/8/2011	7:35:15 PM	Run finished at 7:35 PM
2/8/2011	7:35:15 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/8/2011	7:38:12 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
2/8/2011	7:38:23 PM	Recipe started at 7:38 PM
2/8/2011	7:38:23 PM	Helium valve closed
2/8/2011	7:38:23 PM	H2 valve closed
2/8/2011	7:38:23 PM	BCl3 valve closed
2/8/2011	7:38:23 PM	PH3 valve closed
2/8/2011	7:38:23 PM	SiCl4 pre valve closed
2/8/2011	7:38:23 PM	SiCl4 post valve closed
2/8/2011	7:38:23 PM	Main Vac valve closed
2/8/2011	7:38:23 PM	Bubbler valve closed
2/8/2011	7:38:23 PM	Bypass valve opened
2/8/2011	7:38:23 PM	Helium MFC set to  0.000000
2/8/2011	7:38:23 PM	H2 MFC set to  0.000000
2/8/2011	7:38:23 PM	BCl3 MFC set to  0.000000
2/8/2011	7:38:23 PM	PHl3 MFC set to  0.000000
2/8/2011	7:38:23 PM	SiCl4 MFC set to  0.000000
2/8/2011	7:38:23 PM	Bypass solenoid MFC set to  0.000000
2/8/2011	7:38:24 PM	Tube furnace set to 0
2/8/2011	7:38:24 PM	Helium valve closed
2/8/2011	7:38:24 PM	H2 valve closed
2/8/2011	7:38:24 PM	BCl3 valve closed
2/8/2011	7:38:24 PM	PH3 valve closed
2/8/2011	7:38:24 PM	SiCl4 pre valve closed
2/8/2011	7:38:24 PM	SiCl4 post valve closed
2/8/2011	7:38:24 PM	Bubbler valve closed
2/8/2011	7:38:24 PM	Main Vac valve opened
2/8/2011	7:38:24 PM	Bypass valve opened
2/8/2011	7:38:24 PM	Helium MFC set to  0.000000
2/8/2011	7:38:24 PM	H2 MFC set to  0.000000
2/8/2011	7:38:24 PM	BCl3 MFC set to  0.000000
2/8/2011	7:38:24 PM	PHl3 MFC set to  0.000000
2/8/2011	7:38:24 PM	SiCl4 MFC set to  0.000000
2/8/2011	7:38:24 PM	Bypass solenoid MFC set to  0.000000
2/8/2011	7:38:24 PM	Tube furnace set to 0
2/8/2011	7:39:24 PM	H2 valve closed
2/8/2011	7:39:24 PM	BCl3 valve closed
2/8/2011	7:39:24 PM	PH3 valve closed
2/8/2011	7:39:24 PM	SiCl4 pre valve closed
2/8/2011	7:39:24 PM	SiCl4 post valve closed
2/8/2011	7:39:24 PM	Bubbler valve closed
2/8/2011	7:39:24 PM	Helium valve opened
2/8/2011	7:39:24 PM	Main Vac valve opened
2/8/2011	7:39:24 PM	Bypass valve opened
2/8/2011	7:39:24 PM	Helium MFC set to  100.000000
2/8/2011	7:39:24 PM	H2 MFC set to  0.000000
2/8/2011	7:39:24 PM	BCl3 MFC set to  0.000000
2/8/2011	7:39:24 PM	PHl3 MFC set to  0.000000
2/8/2011	7:39:24 PM	SiCl4 MFC set to  0.000000
2/8/2011	7:39:24 PM	Bypass solenoid MFC set to  0.000000
2/8/2011	7:39:24 PM	Tube furnace set to 0
2/8/2011	7:40:24 PM	Helium valve closed
2/8/2011	7:40:24 PM	H2 valve closed
2/8/2011	7:40:24 PM	BCl3 valve closed
2/8/2011	7:40:24 PM	PH3 valve closed
2/8/2011	7:40:24 PM	SiCl4 pre valve closed
2/8/2011	7:40:24 PM	SiCl4 post valve closed
2/8/2011	7:40:24 PM	Bubbler valve closed
2/8/2011	7:40:24 PM	Main Vac valve opened
2/8/2011	7:40:24 PM	Bypass valve opened
2/8/2011	7:40:24 PM	Helium MFC set to  0.000000
2/8/2011	7:40:24 PM	H2 MFC set to  0.000000
2/8/2011	7:40:24 PM	BCl3 MFC set to  0.000000
2/8/2011	7:40:24 PM	PHl3 MFC set to  0.000000
2/8/2011	7:40:24 PM	SiCl4 MFC set to  0.000000
2/8/2011	7:40:24 PM	Bypass solenoid MFC set to  0.000000
2/8/2011	7:40:24 PM	Tube furnace set to 0
2/8/2011	7:41:24 PM	H2 valve closed
2/8/2011	7:41:24 PM	BCl3 valve closed
2/8/2011	7:41:24 PM	PH3 valve closed
2/8/2011	7:41:24 PM	SiCl4 pre valve closed
2/8/2011	7:41:24 PM	SiCl4 post valve closed
2/8/2011	7:41:24 PM	Bubbler valve closed
2/8/2011	7:41:24 PM	Helium valve opened
2/8/2011	7:41:24 PM	Main Vac valve opened
2/8/2011	7:41:25 PM	Bypass valve opened
2/8/2011	7:41:25 PM	Helium MFC set to  100.000000
2/8/2011	7:41:25 PM	H2 MFC set to  0.000000
2/8/2011	7:41:25 PM	BCl3 MFC set to  0.000000
2/8/2011	7:41:25 PM	PHl3 MFC set to  0.000000
2/8/2011	7:41:25 PM	SiCl4 MFC set to  0.000000
2/8/2011	7:41:25 PM	Bypass solenoid MFC set to  0.000000
2/8/2011	7:41:25 PM	Tube furnace set to 0
2/8/2011	7:42:25 PM	Helium valve closed
2/8/2011	7:42:25 PM	H2 valve closed
2/8/2011	7:42:25 PM	BCl3 valve closed
2/8/2011	7:42:25 PM	PH3 valve closed
2/8/2011	7:42:25 PM	SiCl4 pre valve closed
2/8/2011	7:42:25 PM	SiCl4 post valve closed
2/8/2011	7:42:25 PM	Bubbler valve closed
2/8/2011	7:42:25 PM	Main Vac valve opened
2/8/2011	7:42:25 PM	Bypass valve opened
2/8/2011	7:42:25 PM	Helium MFC set to  0.000000
2/8/2011	7:42:25 PM	H2 MFC set to  0.000000
2/8/2011	7:42:25 PM	BCl3 MFC set to  0.000000
2/8/2011	7:42:25 PM	PHl3 MFC set to  0.000000
2/8/2011	7:42:25 PM	SiCl4 MFC set to  0.000000
2/8/2011	7:42:25 PM	Bypass solenoid MFC set to  0.000000
2/8/2011	7:42:25 PM	Tube furnace set to 0
2/8/2011	7:43:25 PM	H2 valve closed
2/8/2011	7:43:25 PM	BCl3 valve closed
2/8/2011	7:43:25 PM	PH3 valve closed
2/8/2011	7:43:25 PM	SiCl4 pre valve closed
2/8/2011	7:43:25 PM	SiCl4 post valve closed
2/8/2011	7:43:25 PM	Bubbler valve closed
2/8/2011	7:43:25 PM	Helium valve opened
2/8/2011	7:43:25 PM	Main Vac valve opened
2/8/2011	7:43:25 PM	Bypass valve opened
2/8/2011	7:43:25 PM	Helium MFC set to  100.000000
2/8/2011	7:43:25 PM	H2 MFC set to  0.000000
2/8/2011	7:43:25 PM	BCl3 MFC set to  0.000000
2/8/2011	7:43:25 PM	PHl3 MFC set to  0.000000
2/8/2011	7:43:25 PM	SiCl4 MFC set to  0.000000
2/8/2011	7:43:25 PM	Bypass solenoid MFC set to  0.000000
2/8/2011	7:43:25 PM	Tube furnace set to 0
2/8/2011	7:44:25 PM	Helium valve closed
2/8/2011	7:44:25 PM	H2 valve closed
2/8/2011	7:44:25 PM	BCl3 valve closed
2/8/2011	7:44:25 PM	PH3 valve closed
2/8/2011	7:44:25 PM	SiCl4 pre valve closed
2/8/2011	7:44:25 PM	SiCl4 post valve closed
2/8/2011	7:44:25 PM	Bubbler valve closed
2/8/2011	7:44:25 PM	Main Vac valve opened
2/8/2011	7:44:25 PM	Bypass valve opened
2/8/2011	7:44:25 PM	Helium MFC set to  0.000000
2/8/2011	7:44:25 PM	H2 MFC set to  0.000000
2/8/2011	7:44:25 PM	BCl3 MFC set to  0.000000
2/8/2011	7:44:25 PM	PHl3 MFC set to  0.000000
2/8/2011	7:44:25 PM	SiCl4 MFC set to  0.000000
2/8/2011	7:44:25 PM	Bypass solenoid MFC set to  0.000000
2/8/2011	7:44:25 PM	Tube furnace set to 0
2/8/2011	7:45:25 PM	H2 valve closed
2/8/2011	7:45:25 PM	BCl3 valve closed
2/8/2011	7:45:25 PM	PH3 valve closed
2/8/2011	7:45:25 PM	SiCl4 pre valve closed
2/8/2011	7:45:25 PM	SiCl4 post valve closed
2/8/2011	7:45:25 PM	Bubbler valve closed
2/8/2011	7:45:25 PM	Helium valve opened
2/8/2011	7:45:25 PM	Main Vac valve opened
2/8/2011	7:45:25 PM	Bypass valve opened
2/8/2011	7:45:25 PM	Helium MFC set to  100.000000
2/8/2011	7:45:25 PM	H2 MFC set to  0.000000
2/8/2011	7:45:25 PM	BCl3 MFC set to  0.000000
2/8/2011	7:45:25 PM	PHl3 MFC set to  0.000000
2/8/2011	7:45:25 PM	SiCl4 MFC set to  0.000000
2/8/2011	7:45:25 PM	Bypass solenoid MFC set to  0.000000
2/8/2011	7:45:25 PM	Tube furnace set to 0
2/8/2011	7:46:25 PM	Helium valve closed
2/8/2011	7:46:25 PM	H2 valve closed
2/8/2011	7:46:25 PM	BCl3 valve closed
2/8/2011	7:46:25 PM	PH3 valve closed
2/8/2011	7:46:25 PM	SiCl4 pre valve closed
2/8/2011	7:46:25 PM	SiCl4 post valve closed
2/8/2011	7:46:25 PM	Bubbler valve closed
2/8/2011	7:46:25 PM	Main Vac valve opened
2/8/2011	7:46:25 PM	Bypass valve opened
2/8/2011	7:46:25 PM	Helium MFC set to  0.000000
2/8/2011	7:46:25 PM	H2 MFC set to  0.000000
2/8/2011	7:46:25 PM	BCl3 MFC set to  0.000000
2/8/2011	7:46:25 PM	PHl3 MFC set to  0.000000
2/8/2011	7:46:25 PM	SiCl4 MFC set to  0.000000
2/8/2011	7:46:25 PM	Bypass solenoid MFC set to  0.000000
2/8/2011	7:46:26 PM	Tube furnace set to 0
2/8/2011	7:47:26 PM	H2 valve closed
2/8/2011	7:47:26 PM	BCl3 valve closed
2/8/2011	7:47:26 PM	PH3 valve closed
2/8/2011	7:47:26 PM	SiCl4 pre valve closed
2/8/2011	7:47:26 PM	SiCl4 post valve closed
2/8/2011	7:47:26 PM	Bubbler valve closed
2/8/2011	7:47:26 PM	Helium valve opened
2/8/2011	7:47:26 PM	Main Vac valve opened
2/8/2011	7:47:26 PM	Bypass valve opened
2/8/2011	7:47:26 PM	Helium MFC set to  100.000000
2/8/2011	7:47:26 PM	H2 MFC set to  0.000000
2/8/2011	7:47:26 PM	BCl3 MFC set to  0.000000
2/8/2011	7:47:26 PM	PHl3 MFC set to  0.000000
2/8/2011	7:47:26 PM	SiCl4 MFC set to  0.000000
2/8/2011	7:47:26 PM	Bypass solenoid MFC set to  0.000000
2/8/2011	7:47:26 PM	Tube furnace set to 0
2/8/2011	7:48:26 PM	Helium valve closed
2/8/2011	7:48:26 PM	H2 valve closed
2/8/2011	7:48:26 PM	BCl3 valve closed
2/8/2011	7:48:26 PM	PH3 valve closed
2/8/2011	7:48:26 PM	SiCl4 pre valve closed
2/8/2011	7:48:26 PM	SiCl4 post valve closed
2/8/2011	7:48:26 PM	Bubbler valve closed
2/8/2011	7:48:26 PM	Main Vac valve opened
2/8/2011	7:48:26 PM	Bypass valve opened
2/8/2011	7:48:26 PM	Helium MFC set to  0.000000
2/8/2011	7:48:26 PM	H2 MFC set to  0.000000
2/8/2011	7:48:26 PM	BCl3 MFC set to  0.000000
2/8/2011	7:48:26 PM	PHl3 MFC set to  0.000000
2/8/2011	7:48:26 PM	SiCl4 MFC set to  0.000000
2/8/2011	7:48:26 PM	Bypass solenoid MFC set to  0.000000
2/8/2011	7:48:26 PM	Tube furnace set to 0
2/8/2011	7:49:26 PM	H2 valve closed
2/8/2011	7:49:26 PM	BCl3 valve closed
2/8/2011	7:49:26 PM	PH3 valve closed
2/8/2011	7:49:26 PM	SiCl4 pre valve closed
2/8/2011	7:49:26 PM	SiCl4 post valve closed
2/8/2011	7:49:26 PM	Bubbler valve closed
2/8/2011	7:49:26 PM	Helium valve opened
2/8/2011	7:49:26 PM	Main Vac valve opened
2/8/2011	7:49:26 PM	Bypass valve opened
2/8/2011	7:49:26 PM	Helium MFC set to  100.000000
2/8/2011	7:49:26 PM	H2 MFC set to  0.000000
2/8/2011	7:49:26 PM	BCl3 MFC set to  0.000000
2/8/2011	7:49:26 PM	PHl3 MFC set to  0.000000
2/8/2011	7:49:26 PM	SiCl4 MFC set to  0.000000
2/8/2011	7:49:26 PM	Bypass solenoid MFC set to  0.000000
2/8/2011	7:49:26 PM	Tube furnace set to 0
2/8/2011	7:50:26 PM	Helium valve closed
2/8/2011	7:50:26 PM	H2 valve closed
2/8/2011	7:50:26 PM	BCl3 valve closed
2/8/2011	7:50:26 PM	PH3 valve closed
2/8/2011	7:50:26 PM	SiCl4 pre valve closed
2/8/2011	7:50:26 PM	SiCl4 post valve closed
2/8/2011	7:50:26 PM	Bubbler valve closed
2/8/2011	7:50:26 PM	Main Vac valve opened
2/8/2011	7:50:26 PM	Bypass valve opened
2/8/2011	7:50:26 PM	Helium MFC set to  0.000000
2/8/2011	7:50:26 PM	H2 MFC set to  0.000000
2/8/2011	7:50:26 PM	BCl3 MFC set to  0.000000
2/8/2011	7:50:26 PM	PHl3 MFC set to  0.000000
2/8/2011	7:50:26 PM	SiCl4 MFC set to  0.000000
2/8/2011	7:50:26 PM	Bypass solenoid MFC set to  0.000000
2/8/2011	7:50:26 PM	Tube furnace set to 0
2/8/2011	7:51:26 PM	H2 valve closed
2/8/2011	7:51:26 PM	BCl3 valve closed
2/8/2011	7:51:26 PM	PH3 valve closed
2/8/2011	7:51:26 PM	SiCl4 pre valve closed
2/8/2011	7:51:26 PM	SiCl4 post valve closed
2/8/2011	7:51:26 PM	Bubbler valve closed
2/8/2011	7:51:26 PM	Helium valve opened
2/8/2011	7:51:26 PM	Main Vac valve opened
2/8/2011	7:51:26 PM	Bypass valve opened
2/8/2011	7:51:26 PM	Helium MFC set to  100.000000
2/8/2011	7:51:26 PM	H2 MFC set to  0.000000
2/8/2011	7:51:26 PM	BCl3 MFC set to  0.000000
2/8/2011	7:51:26 PM	PHl3 MFC set to  0.000000
2/8/2011	7:51:26 PM	SiCl4 MFC set to  0.000000
2/8/2011	7:51:26 PM	Bypass solenoid MFC set to  0.000000
2/8/2011	7:51:27 PM	Tube furnace set to 0
2/8/2011	7:52:27 PM	Helium valve closed
2/8/2011	7:52:27 PM	H2 valve closed
2/8/2011	7:52:27 PM	BCl3 valve closed
2/8/2011	7:52:27 PM	PH3 valve closed
2/8/2011	7:52:27 PM	SiCl4 pre valve closed
2/8/2011	7:52:27 PM	SiCl4 post valve closed
2/8/2011	7:52:27 PM	Bubbler valve closed
2/8/2011	7:52:27 PM	Main Vac valve opened
2/8/2011	7:52:27 PM	Bypass valve opened
2/8/2011	7:52:27 PM	Helium MFC set to  0.000000
2/8/2011	7:52:27 PM	H2 MFC set to  0.000000
2/8/2011	7:52:27 PM	BCl3 MFC set to  0.000000
2/8/2011	7:52:27 PM	PHl3 MFC set to  0.000000
2/8/2011	7:52:27 PM	SiCl4 MFC set to  0.000000
2/8/2011	7:52:27 PM	Bypass solenoid MFC set to  0.000000
2/8/2011	7:52:27 PM	Tube furnace set to 0
2/8/2011	7:53:27 PM	H2 valve closed
2/8/2011	7:53:27 PM	BCl3 valve closed
2/8/2011	7:53:27 PM	PH3 valve closed
2/8/2011	7:53:27 PM	SiCl4 pre valve closed
2/8/2011	7:53:27 PM	SiCl4 post valve closed
2/8/2011	7:53:27 PM	Bubbler valve closed
2/8/2011	7:53:27 PM	Helium valve opened
2/8/2011	7:53:27 PM	Main Vac valve opened
2/8/2011	7:53:27 PM	Bypass valve opened
2/8/2011	7:53:27 PM	Helium MFC set to  100.000000
2/8/2011	7:53:27 PM	H2 MFC set to  0.000000
2/8/2011	7:53:27 PM	BCl3 MFC set to  0.000000
2/8/2011	7:53:27 PM	PHl3 MFC set to  0.000000
2/8/2011	7:53:27 PM	SiCl4 MFC set to  0.000000
2/8/2011	7:53:27 PM	Bypass solenoid MFC set to  0.000000
2/8/2011	7:53:27 PM	Tube furnace set to 0
2/8/2011	7:54:27 PM	Helium valve closed
2/8/2011	7:54:27 PM	H2 valve closed
2/8/2011	7:54:27 PM	BCl3 valve closed
2/8/2011	7:54:27 PM	PH3 valve closed
2/8/2011	7:54:27 PM	SiCl4 pre valve closed
2/8/2011	7:54:27 PM	SiCl4 post valve closed
2/8/2011	7:54:27 PM	Bubbler valve closed
2/8/2011	7:54:27 PM	Main Vac valve opened
2/8/2011	7:54:27 PM	Bypass valve opened
2/8/2011	7:54:27 PM	Helium MFC set to  0.000000
2/8/2011	7:54:27 PM	H2 MFC set to  0.000000
2/8/2011	7:54:27 PM	BCl3 MFC set to  0.000000
2/8/2011	7:54:27 PM	PHl3 MFC set to  0.000000
2/8/2011	7:54:27 PM	SiCl4 MFC set to  0.000000
2/8/2011	7:54:27 PM	Bypass solenoid MFC set to  0.000000
2/8/2011	7:54:27 PM	Tube furnace set to 0
2/8/2011	7:55:27 PM	H2 valve closed
2/8/2011	7:55:27 PM	BCl3 valve closed
2/8/2011	7:55:27 PM	PH3 valve closed
2/8/2011	7:55:27 PM	SiCl4 pre valve closed
2/8/2011	7:55:27 PM	SiCl4 post valve closed
2/8/2011	7:55:27 PM	Bubbler valve closed
2/8/2011	7:55:27 PM	Helium valve opened
2/8/2011	7:55:27 PM	Main Vac valve opened
2/8/2011	7:55:27 PM	Bypass valve opened
2/8/2011	7:55:27 PM	Helium MFC set to  100.000000
2/8/2011	7:55:27 PM	H2 MFC set to  0.000000
2/8/2011	7:55:27 PM	BCl3 MFC set to  0.000000
2/8/2011	7:55:27 PM	PHl3 MFC set to  0.000000
2/8/2011	7:55:27 PM	SiCl4 MFC set to  0.000000
2/8/2011	7:55:27 PM	Bypass solenoid MFC set to  0.000000
2/8/2011	7:55:27 PM	Tube furnace set to 0
2/8/2011	7:56:27 PM	Helium valve closed
2/8/2011	7:56:27 PM	H2 valve closed
2/8/2011	7:56:27 PM	BCl3 valve closed
2/8/2011	7:56:27 PM	PH3 valve closed
2/8/2011	7:56:27 PM	SiCl4 pre valve closed
2/8/2011	7:56:27 PM	SiCl4 post valve closed
2/8/2011	7:56:27 PM	Bubbler valve closed
2/8/2011	7:56:27 PM	Main Vac valve opened
2/8/2011	7:56:27 PM	Bypass valve opened
2/8/2011	7:56:27 PM	Helium MFC set to  0.000000
2/8/2011	7:56:27 PM	H2 MFC set to  0.000000
2/8/2011	7:56:27 PM	BCl3 MFC set to  0.000000
2/8/2011	7:56:27 PM	PHl3 MFC set to  0.000000
2/8/2011	7:56:27 PM	SiCl4 MFC set to  0.000000
2/8/2011	7:56:27 PM	Bypass solenoid MFC set to  0.000000
2/8/2011	7:56:28 PM	Tube furnace set to 0
2/8/2011	7:57:28 PM	H2 valve closed
2/8/2011	7:57:28 PM	BCl3 valve closed
2/8/2011	7:57:28 PM	PH3 valve closed
2/8/2011	7:57:28 PM	SiCl4 pre valve closed
2/8/2011	7:57:28 PM	SiCl4 post valve closed
2/8/2011	7:57:28 PM	Bubbler valve closed
2/8/2011	7:57:28 PM	Helium valve opened
2/8/2011	7:57:28 PM	Main Vac valve opened
2/8/2011	7:57:28 PM	Bypass valve opened
2/8/2011	7:57:28 PM	Helium MFC set to  100.000000
2/8/2011	7:57:28 PM	H2 MFC set to  0.000000
2/8/2011	7:57:28 PM	BCl3 MFC set to  0.000000
2/8/2011	7:57:28 PM	PHl3 MFC set to  0.000000
2/8/2011	7:57:28 PM	SiCl4 MFC set to  0.000000
2/8/2011	7:57:28 PM	Bypass solenoid MFC set to  0.000000
2/8/2011	7:57:28 PM	Tube furnace set to 0
2/8/2011	7:58:28 PM	Helium valve closed
2/8/2011	7:58:28 PM	H2 valve closed
2/8/2011	7:58:28 PM	BCl3 valve closed
2/8/2011	7:58:28 PM	PH3 valve closed
2/8/2011	7:58:28 PM	SiCl4 pre valve closed
2/8/2011	7:58:28 PM	SiCl4 post valve closed
2/8/2011	7:58:28 PM	Bubbler valve closed
2/8/2011	7:58:28 PM	Main Vac valve opened
2/8/2011	7:58:28 PM	Bypass valve opened
2/8/2011	7:58:28 PM	Helium MFC set to  0.000000
2/8/2011	7:58:28 PM	H2 MFC set to  0.000000
2/8/2011	7:58:28 PM	BCl3 MFC set to  0.000000
2/8/2011	7:58:28 PM	PHl3 MFC set to  0.000000
2/8/2011	7:58:28 PM	SiCl4 MFC set to  0.000000
2/8/2011	7:58:28 PM	Bypass solenoid MFC set to  0.000000
2/8/2011	7:58:28 PM	Tube furnace set to 0
2/8/2011	7:58:29 PM	Run finished at 7:58 PM
2/8/2011	7:58:29 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
2/8/2011	8:55:22 PM	Recipe started at 8:55 PM
2/8/2011	8:55:22 PM	Helium valve closed
2/8/2011	8:55:22 PM	BCl3 valve closed
2/8/2011	8:55:22 PM	PH3 valve closed
2/8/2011	8:55:22 PM	SiCl4 pre valve closed
2/8/2011	8:55:22 PM	SiCl4 post valve closed
2/8/2011	8:55:22 PM	Main Vac valve closed
2/8/2011	8:55:22 PM	Bypass valve closed
2/8/2011	8:55:22 PM	Bubbler valve closed
2/8/2011	8:55:22 PM	H2 valve opened
2/8/2011	8:55:22 PM	Helium MFC set to  0.000000
2/8/2011	8:55:22 PM	H2 MFC set to  500.000000
2/8/2011	8:55:22 PM	BCl3 MFC set to  0.000000
2/8/2011	8:55:22 PM	PHl3 MFC set to  0.000000
2/8/2011	8:55:22 PM	SiCl4 MFC set to  0.000000
2/8/2011	8:55:22 PM	Bypass solenoid MFC set to  0.000000
2/8/2011	8:55:22 PM	Tube furnace set to 0
2/8/2011	8:56:45 PM	Helium valve closed
2/8/2011	8:56:45 PM	BCl3 valve closed
2/8/2011	8:56:45 PM	PH3 valve closed
2/8/2011	8:56:45 PM	SiCl4 pre valve closed
2/8/2011	8:56:45 PM	SiCl4 post valve closed
2/8/2011	8:56:45 PM	Main Vac valve closed
2/8/2011	8:56:45 PM	Bypass valve closed
2/8/2011	8:56:45 PM	H2 valve opened
2/8/2011	8:56:45 PM	Bubbler valve opened
2/8/2011	8:56:45 PM	Helium MFC set to  0.000000
2/8/2011	8:56:45 PM	H2 MFC set to  500.000000
2/8/2011	8:56:45 PM	BCl3 MFC set to  0.000000
2/8/2011	8:56:45 PM	PHl3 MFC set to  0.000000
2/8/2011	8:56:45 PM	SiCl4 MFC set to  0.000000
2/8/2011	8:56:45 PM	Bypass solenoid MFC set to  0.000000
2/8/2011	8:56:45 PM	Tube furnace set to 1000
2/8/2011	9:16:45 PM	Helium valve closed
2/8/2011	9:16:45 PM	PH3 valve closed
2/8/2011	9:16:45 PM	Main Vac valve closed
2/8/2011	9:16:45 PM	Bypass valve closed
2/8/2011	9:16:45 PM	H2 valve opened
2/8/2011	9:16:45 PM	BCl3 valve opened
2/8/2011	9:16:45 PM	SiCl4 pre valve opened
2/8/2011	9:16:45 PM	SiCl4 post valve opened
2/8/2011	9:16:45 PM	Bubbler valve opened
2/8/2011	9:16:45 PM	Helium MFC set to  0.000000
2/8/2011	9:16:45 PM	H2 MFC set to  500.000000
2/8/2011	9:16:45 PM	BCl3 MFC set to  3.000000
2/8/2011	9:16:45 PM	PHl3 MFC set to  0.000000
2/8/2011	9:16:45 PM	SiCl4 MFC set to  50.000000
2/8/2011	9:16:45 PM	Bypass solenoid MFC set to  0.000000
2/8/2011	9:16:45 PM	Tube furnace set to 1000
2/8/2011	9:31:45 PM	H2 valve closed
2/8/2011	9:31:45 PM	BCl3 valve closed
2/8/2011	9:31:45 PM	PH3 valve closed
2/8/2011	9:31:45 PM	SiCl4 pre valve closed
2/8/2011	9:31:45 PM	SiCl4 post valve closed
2/8/2011	9:31:45 PM	Main Vac valve closed
2/8/2011	9:31:45 PM	Bypass valve closed
2/8/2011	9:31:45 PM	Helium valve opened
2/8/2011	9:31:45 PM	Bubbler valve opened
2/8/2011	9:31:45 PM	Helium MFC set to  500.000000
2/8/2011	9:31:45 PM	H2 MFC set to  0.000000
2/8/2011	9:31:45 PM	BCl3 MFC set to  0.000000
2/8/2011	9:31:45 PM	PHl3 MFC set to  0.000000
2/8/2011	9:31:45 PM	SiCl4 MFC set to  0.000000
2/8/2011	9:31:45 PM	Bypass solenoid MFC set to  0.000000
2/8/2011	9:31:45 PM	Tube furnace set to 0
2/8/2011	9:51:45 PM	Helium valve closed
2/8/2011	9:51:45 PM	H2 valve closed
2/8/2011	9:51:45 PM	BCl3 valve closed
2/8/2011	9:51:45 PM	PH3 valve closed
2/8/2011	9:51:45 PM	SiCl4 pre valve closed
2/8/2011	9:51:45 PM	SiCl4 post valve closed
2/8/2011	9:51:45 PM	Main Vac valve closed
2/8/2011	9:51:45 PM	Bypass valve closed
2/8/2011	9:51:45 PM	Bubbler valve closed
2/8/2011	9:51:45 PM	Helium MFC set to  0.000000
2/8/2011	9:51:45 PM	H2 MFC set to  0.000000
2/8/2011	9:51:45 PM	BCl3 MFC set to  0.000000
2/8/2011	9:51:45 PM	PHl3 MFC set to  0.000000
2/8/2011	9:51:45 PM	SiCl4 MFC set to  0.000000
2/8/2011	9:51:45 PM	Bypass solenoid MFC set to  0.000000
2/8/2011	9:51:46 PM	Tube furnace set to 0
2/8/2011	9:51:46 PM	Run finished at 9:51 PM
2/8/2011	10:04:23 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/8/2011	10:04:23 PM	Recipe started at 10:04 PM
2/8/2011	10:04:23 PM	Helium valve closed
2/8/2011	10:04:23 PM	H2 valve closed
2/8/2011	10:04:23 PM	BCl3 valve closed
2/8/2011	10:04:23 PM	PH3 valve closed
2/8/2011	10:04:23 PM	SiCl4 pre valve closed
2/8/2011	10:04:23 PM	SiCl4 post valve closed
2/8/2011	10:04:23 PM	Main Vac valve closed
2/8/2011	10:04:23 PM	Bubbler valve closed
2/8/2011	10:04:23 PM	Bypass valve opened
2/8/2011	10:04:23 PM	Helium MFC set to  0.000000
2/8/2011	10:04:23 PM	H2 MFC set to  0.000000
2/8/2011	10:04:23 PM	BCl3 MFC set to  0.000000
2/8/2011	10:04:23 PM	PHl3 MFC set to  0.000000
2/8/2011	10:04:23 PM	SiCl4 MFC set to  0.000000
2/8/2011	10:04:23 PM	Bypass solenoid MFC set to  0.000000
2/8/2011	10:04:24 PM	Tube furnace set to 0
2/8/2011	10:04:56 PM	Helium valve closed
2/8/2011	10:04:56 PM	H2 valve closed
2/8/2011	10:04:56 PM	BCl3 valve closed
2/8/2011	10:04:56 PM	PH3 valve closed
2/8/2011	10:04:56 PM	SiCl4 pre valve closed
2/8/2011	10:04:56 PM	SiCl4 post valve closed
2/8/2011	10:04:56 PM	Bubbler valve closed
2/8/2011	10:04:56 PM	Main Vac valve opened
2/8/2011	10:04:56 PM	Bypass valve opened
2/8/2011	10:04:56 PM	Helium MFC set to  0.000000
2/8/2011	10:04:56 PM	H2 MFC set to  0.000000
2/8/2011	10:04:56 PM	BCl3 MFC set to  0.000000
2/8/2011	10:04:56 PM	PHl3 MFC set to  0.000000
2/8/2011	10:04:56 PM	SiCl4 MFC set to  0.000000
2/8/2011	10:04:56 PM	Bypass solenoid MFC set to  0.000000
2/8/2011	10:04:56 PM	Tube furnace set to 0
2/8/2011	10:04:56 PM	Run finished at 10:04 PM
2/8/2011	10:04:56 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
